Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 38 / 74

RF Power Supply and Matching Box 4. Functions
30
4-2-3. Automatic matching controller AMC.EXT pin assignments
Pin
number Signal name Contents Input/outp
ut
1-9
AUTO/MANUAL
switching Closed: Enabled only when ANALOG or PR·RC mode
The controller section switches to manual mode, shifts the
positions of the variable capacitors according to
the TUNE/MATCH analog preset input voltage.
Open: Enabled only when ANALOG or PR·RC mode
The controller section switches to automatic mode, and
holds the automatic matching state. (Does not follow the
TUNE/MATCH analog preset input voltage)
Input
2-10 BUSY output Closes by motor operation regardless of automatic/manual
mode Output
7-15 MANUAL response Closed when specifying manual mode with an external
command Output
3-11 TUNE analog preset 0.1 to 9.9 V/1 to 99% (±5%)
(However, does not operate for voltages 0.1 V or lower) Input
4-12 MATCH analog preset 0.1 to 9.9 V/1 to 99% (±5%)
(However, does not operate for voltages 0.1 V or lower) Input
5-13 TUNE monitor 0 to 99%/0 to 9.9 V (±5%) Output
6-14 MATCH monitor 0 to 99%/0 to 9.9 V (±5%) Output
23-24 STANDBY signal Closes by input of AC power. Opens at Alarm. Output
* Please prepare contacts with a capacity of 12 VDC and 12 mA or higher.
* If using semiconductor devices, please prepare devices with a leakage current 0.1 mA or lower.
* Caution when using the external control terminal. If connecting an inductive load (relay or coil) to the
output of the external control terminal, insert a diode or use a relay with a surge absorbing element so
that counter-electromotive force is not generated.
Table 4-8 Automatic matching controller AMC.EXT pin assignments
Figure 4-7 Automatic matching controller AMC.EXT pin assignments
10V
5
3
+ -
ＴＵＮＥ monitor
Ext. Control Device
11
1
9
AUTO/MANUAL switch*
+ -
ＴＵＮＥ analog preset
13
6
ＭＡＴＣＨ monitor
14
Inside AMC
2
10
BUSY
25V 100mA max
10V
4
+ -
12
ＭＡＴＣＨ preset
7
15
MANUAL response
25V 100mA max
7
15
STANDBY signal
25V 100mA max