Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 31 / 74

RF Power Supply and Matching Box 4. Functions
23
4-1-5. External control terminal pin assignments
When performing external control, see "Figure 4-3 RF power supply INTERFACE connector pin
assignments" and use the included connector to connect external control. Even if the external control
terminal is not used, connect pin 1 and pin 14 (external interlock) with a jumper wire.
Connector name Pin number Signal name Comments Input/o
utput
INTERFACE
(D-sub 25
female) 1-14 External interlock Close to release the interlock Input
2-15 RESET Close to input reset Input
3-16 RF ON command Close for RF ON Input
4-17 RF ON answer Closed with RF ON Output
5-18 ALARM Closed with AC OFF ALARM occurrence,
clear with reset Output
6-19 ARC Closed when arcing occurs Output
7-20 POWER SET Traveling wave power setting input 0 to rated
power/0 to 10 V Input
8-21 Pf monitor Traveling wave power monitor output 0 to 10
V/0 to rated power Output
9-22 Pr monitor Reflected wave power monitor output 0 to 10
V/0 to rated power Output
10-23 VDC monitor VDC monitor output 0 to 10 V/0 to rated
voltage Output
11-24 VPP monitor VPP monitor output 0 to 10 V/0 to rated
voltage Output
12-25 Interlock
response
When you remove both “MB-FAIL” and
“Interlock”, it is closed.
Output
13 RESERVE System reserved -
OSC BNC
connector External oscillator
input 13.56 MHz ± 0.05% Input
13 dBm ± 3 dB
* INTERFACE connector pins 20, 21, 22, 23, and 24 are GND
Input the external oscillator input for 13 MHz power supplies with an accuracy of 13.56 MHz ± 0.05%.
Input the external oscillator input for 27 MHz power supplies with an accuracy of 27.12 MHz ± 0.05%.
If the frequency is different, the power supply may be damaged.
Please use PIN10-23 in the open state, because there is no VDC detection function except
MBX-13200F-VD(option)
Caution
Table 4-5 RF power supply INTERFACE pin assignments