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RF0033E_08 

i 

 

 

 
 

 
 

 

Instruction Manual 

 
 

Solid-State RF Power Supply 
Matching Box 

 
 

Model:   

 

 

RF Power Supply 

RFS-13100F 

/ 

RFS-13150F 

 

RFS-13200F 

/ 

RFS-27400F

 

 

 

 

 

Matching Box 

MBX-13100F 

/ 

MBX-13150F 

                                                                                 

MBX-13200F 

/ 

MBX-27400F 

 

 

 

 

Matching Controller 

AMC-9L 

/ 

AMC-9LT 

 

 

 

 

 
 
 
 
 
 
 
 
 
 
 
 
 

Revised 8th edition 08/29/2023 

ULVAC Inc. 

 

 
※

Read this manual before using the product.   
Store this manual carefully so that it can be used at anytime.     

Содержание RFS-13100F

Страница 1: ...Supply RFS 13100F RFS 13150F RFS 13200F RFS 27400F Matching Box MBX 13100F MBX 13150F MBX 13200F MBX 27400F Matching Controller AMC 9L AMC 9LT Revised 8th edition 08 29 2023 ULVAC Inc Read this manual...

Страница 2: ...1 For Safe Operation from page 1 Carefully read and understand these sections before using the product Carefully store this manual nearby so it can be used at anytime When the product s installation l...

Страница 3: ...oneous operation or inadequate maintenance and inspection work Never try to operate the product before carefully reading and understanding the operation inspection and maintenance sections 3 Warnings...

Страница 4: ...d Work that ignores this warning carries the risk of minor injury to the operator damage to the product or the product may require adjustment There is no direct danger but this symbol notes content yo...

Страница 5: ...d others or disasters from force majeure events such as war 3 Malfunction or failure caused by inattention during handling or mistaken usage 4 Products modified disassembled or repaired without ULVAC...

Страница 6: ...kly perform repairs please work to ensure the accuracy of the information If you have determined there is a malfunction or if you have any questions contact one of the locations listed below When cont...

Страница 7: ...rnal control terminal INTERFACE 25 4 1 6 RF power supply parameters 26 4 2 Automatic matching controller functions 28 4 2 1 Automatic matching controller part names and functions 28 4 2 2 Control pane...

Страница 8: ...of Contents 6 2 Matching box maintenance and inspection 53 7 Troubleshooting 55 7 1 Troubleshooting 55 7 1 1 Troubleshooting related to the RF power supply 55 7 1 2 Troubleshooting related to the mat...

Страница 9: ...ent enough to pose a danger to human life The utmost care must be taken when handling the product If by some chance a person touches this voltage it will lead to a serious accident Take great care not...

Страница 10: ...xclusive dealer A nameplate is also affixed to the top surface of the power supply Take special care to ensure the nameplate is always legible 1 3 Contact information To order parts ask questions abou...

Страница 11: ...an continuously output its rated power at a single frequency of 13 56 MHz This system also has a control terminal that makes external control by a PLC possible 2 2 Features The solid state design elim...

Страница 12: ...ller AMC 9L AMC 9LT PRESET 2 3 Configuration This system consists of an RF power supply a matching box and a matching controller The system s configuration is shown in Figure 2 1 System configuration...

Страница 13: ...r 1000 W 1500 W Output impedance 50 Harmonic distortion 45 dB or lower in continuous mode at rated output Power stability 3 or less of rated power 10 to 100 of rated power Rise time 200 ms minimum Lin...

Страница 14: ...r stability 3 or less of rated power 10 to 100 of rated power Rise time 200 ms minimum Linearity 2 or less of rated power 10 to 100 of rated power Output connector EIA 1 5 8 Cooling Cooling method Wat...

Страница 15: ...to 100 of rated power Rise time 200 ms minimum Linearity 4 or less of rated power 10 to 100 of rated power Output connector EIA 3 1 8 Cooling Cooling method Water cooled 2 systems Water temperature 5...

Страница 16: ...rlock has operated Stops RF output Returns to the standby state if cleared RF OFF ALARM Overheat Fan air volume decrease Cooling water volume decrease RF amp output unbalanced Cover open Main fuse blo...

Страница 17: ...whichever is greater Cooling Cooling method Water cooling and air cooling Water temperature 5 C to 25 C Water volume 2 L min or more Water quality See RF system cooling water Water quality Differentia...

Страница 18: ...cooling Water temperature 5 C to 25 C Water volume 2 L min or more Water quality See RF system cooling water Water quality Differential pressure Approx 0 15 MPa at 2 L min Withstand pressure 0 96 MPa...

Страница 19: ...min or more Water quality See RF system cooling water Water quality Differential pressure Approx 0 15 MPa at 2 L min Withstand pressure 0 96 MPa Internal hose diameter 1 4 inch Joint PT 3 8 Alarm outp...

Страница 20: ...min at 50 60 Hz between AC LINE and CASE Ambient temperature during operation 0 C to 40 C Ambient humidity during operation 15 to 85 RH no condensation Operating environment Avoid direct sunlight hea...

Страница 21: ...ling water outside of these conditions will shorten the lifespan of the power supply and cause malfunction Avoid using pure water If pure water is open to the atmosphere it absorbs carbon dioxide in t...

Страница 22: ...F 8 sq RFS 13200F 22 sq RFS 27400F 60sq 1 set 2 GND cable RF power supply GND cable 5 m User terminal untreated wire size RFS 13100F RFS 13150F 8 sq RFS 13200F 14 sq RFS 27400F 14sq 1 set 3 External c...

Страница 23: ...ly ensure that undue force is not exerted on the front panel See Figure 3 1 Rack mount type RF power supply installation example Also provide ample clearance in the area around the power supply for ai...

Страница 24: ...n interlock switch on the output surface panel If the interlock switch on the output surface panel is not pressed tightly because the RF access port is too large be aware that the interlock will not b...

Страница 25: ...nd connect the cables See Table 3 3 Cable list for the cables used Please prepare the wiring between the matching box and the chamber and the GND wiring yourself When you use RFS 27400F please prepare...

Страница 26: ...und the system Wire the ground so that the matching box s ground resistance is 10 or less According to Japanese standards Class A grounding in Article 18 of the Electrical Equipment Standards is appli...

Страница 27: ...g off the breaker wait 30 seconds or more before supplying the power again 2 AC INPUT connectorConnect the power input cable 3 RF OUT connector The connector to output RF power 4 MB SIG connector Conn...

Страница 28: ...ase in setting values Up key down key Can select menus and change the digit of setting values During operation the measurement value can be displayed by pushing the arrow keys ESC key Can return to th...

Страница 29: ...oltage exceeds the rated value RF droop VPP Controls traveling wave power if the matching box s output terminal voltage exceeds the rated value RF droop ARC Shuts off traveling wave power if the refle...

Страница 30: ...hen RF ON is set without external oscillator input DC SOURCE FAIL When there is a problem with the DC converter portion When the phase sequence RST for three phase input differs OVER REF PROTECT When...

Страница 31: ...power 0 to 10 V Input 8 21 Pf monitor Traveling wave power monitor output 0 to 10 V 0 to rated power Output 9 22 Pr monitor Reflected wave power monitor output 0 to 10 V 0 to rated power Output 10 23...

Страница 32: ...t of the external control terminal insert a diode or use a relay with a surge absorbing element so that counter electromotive force is not generated Figure 4 3 RF power supply INTERFACE connector pin...

Страница 33: ...If connecting an inductive load relay or coil to the output of the external control terminal insert a diode or use a relay with a surge absorbing element so that counter electromotive force is not ge...

Страница 34: ...IBRATION Do not execute Power calibration menu After selecting EXECUTE and setting calibration power power calibration is available with the up down keys Within 5 of rated power Selecting DEFAULT retu...

Страница 35: ...f set time from RF ON SIGNAL MASKTIME SET DELAY 0 0 s During RF ON the REF signal is not sent within the set time TARGET LIFE INITIAL Do not execute RF output cumulative power initialization Select 0...

Страница 36: ...tor that supplies 100 VAC 2 DET connector Connect to the DET cable 3 AMC connector Connect to the AMC cable 4 AMC EXT connector Wire when using external control 5 GND terminal Grounded by the 3 prong...

Страница 37: ...MATCH CW Increases the capacity of the MATCH variable capacitor select menu change set value digits TUNE CCW Decreases the capacity of the TUNE variable capacitor select menu increase set value TUNE...

Страница 38: ...lower Input 4 12 MATCH analog preset 0 1 to 9 9 V 1 to 99 5 However does not operate for voltages 0 1 V or lower Input 5 13 TUNE monitor 0 to 99 0 to 9 9 V 5 Output 6 14 MATCH monitor 0 to 99 0 to 9...

Страница 39: ...eset number see Table 4 Please prepare contacts with a capacity of 12 VDC and 12 mA or higher If using semiconductor devices please prepare devices with a leakage current 0 1 mA or lower Caution when...

Страница 40: ...No 2 is given as an example in the timing chart OPEN CLOSE AUTO MANUAL select AMC EXT 1 9 Open Close Open Close SELECT1 SELECT 3 11 SELECT2 SELECT 4 12 SELECT3 SELECT 5 13 SELECT4 SELECT 6 14 PRESET...

Страница 41: ...use a relay with a surge absorbing element so that counter electromotive force is not generated AUTO MANUAL switch AMC EXT 1 9 Open Close Open Close SELECT1 SELECT 3 11 SELECT2 SELECT 4 12 SELECT3 SEL...

Страница 42: ...n mode selection screen Configuration menu You can select the item to change by pressing the up and down keys on the configuration menu screen The selected item has the symbol You can change the param...

Страница 43: ...TEBLE PROCEED REF LEVEL 40 LSB The reflected wave feedback level to start decelerating the motor s operation speed Higher is more stable but matching convergence will take time MATCHING DELAY TIME RF...

Страница 44: ...e system Make sure the water volume is the specified rate When the cooling water flow stabilizes turn on the automatic matching controller s main switch The automatic matching controller s self diagno...

Страница 45: ...key Operation mode selection screen Select normal operation NORM and press the ENT key Next the control mode selection screen is displayed Operation mode selection screen Normal operation control mode...

Страница 46: ...eeds the limit the buzzer long sound sounds and the value is ignored Press the RESET key while configuring to set the value to 0 W Press the ENT key to confirm the set value and RF output operation wi...

Страница 47: ...mode selection screen When the setting is complete the power display screen is displayed Power display screen 2 Output settings Input external command voltage via the RF power supply s INTERFACE conne...

Страница 48: ...w RF starts to be output after 10 ms elapses with the RF ON key in the pressed state The RF output rise time is approx 200 ms This can be changed with the user soft start function If the OFF key is pr...

Страница 49: ...ormal operation the selected oscillator is shown but only while pressed Operating by internal oscillator Operating by external oscillator 3 Operation time display menu If the left key is pressed while...

Страница 50: ...operation Press the AUTO button The green LED turns on The variable capacitor position operation buttons are now disabled The matching operation automatically starts in conjunction with the RF power s...

Страница 51: ...preset number and press the ENT key to move the positions of the variable capacitors 3 2 Preset configuration In manual mode move the variable capacitors to the positions you wish to register Afterwa...

Страница 52: ...arrow keys After determining the name confirm the preset name by pressing the ENT key and the variable capacitor position display screen is displayed Position display screen Please insert an AMC cable...

Страница 53: ...arts with RF ON 4 For the AMC EXT connector s pin assignments see Figure 4 7 3 Manual matching operation 1 Switch between automatic and manual with the automatic matching controller s AMC EXT connecto...

Страница 54: ...MC EXT pins 1 9 on the automatic matching controller Automatic matching starts with RF ON For the AMC EXT and PRESET connectors pin assignments see Figure 4 7 and Figure 4 8 The positions of the varia...

Страница 55: ...ed MBX TUNE and MATCH positions by closing PRESET connector pins 2 10 AUTO MANUAL switch AMC EXT 1 9 Open Close Open Close SELECT1 SELECT 3 11 SELECT2 SELECT 4 12 SELECT3 SELECT 5 13 SELECT4 SELECT 6...

Страница 56: ...pacitors inside the matching box discharge the electricity to ground with a grounding rod before touching them 5 3 2 Matching adjustment Turn on RF and increase Pf until 70 to 80 of the maximum reflec...

Страница 57: ...s is between 0 and 100 but a little Pr remains Because the coaxial cable length is inadequate Try changing the coaxial cable length by about 1 m Can match at low power but Pr increases abruptly if Pf...

Страница 58: ...adjusting the number of coil turns open the maintenance side and add a fixed capacitor Then make sure screws aren t loose and close the maintenance side Recommended fixed capacitor to install inside...

Страница 59: ...1 Adjust the TUNE variable capacitor with a fixed capacitor so that the capacity is 20 to 80 when Pr is at its minimum Contains high voltage generating parts so work with extreme caution when making a...

Страница 60: ...y 4 to 5 years Power supply for internal device control 5 Fuse 4 to 5 years 6 Flow meter 4 to 5 years 7 Cooling plate 5 to 7 years Basically handled by internal washing The cooling plate may clog beca...

Страница 61: ...me Periodic maintenance Recommended replacement period Comments 1 Cooling fan 4 to 5 years 2 Vacuum variable capacitor 3 to 4 years 1 million cycles at 50 variability bellows lifespan 4 million cycles...

Страница 62: ...F Power Supply and Matching Box 54 In order to use this product for many years to come please ask ULVAC to periodically overhaul the product using the above table as a reference...

Страница 63: ...he matching box output side panel is not released Refer to item 3 3 in the matching box installation and ensure the output surface panel is firmly making contact For the interlock when the cover is op...

Страница 64: ...ching box 2 Reflected power REF Pr does not decrease Insufficient matching adjustment See 5 3 Matching adjustment and adjust matching Not discharging Check the discharge conditions like gas pressure e...

Страница 65: ...als are included with this manual as a reference RFS 13100F External View RFS 13150F External View RFS 13200F External View RFS 27400F External View MBX 13100F External View MBX 13150F External View M...

Страница 66: ...F Power Supply and Matching Box 58 Figure 8 1 RFS 13100F...

Страница 67: ...F Power Supply and Matching Box 59 Figure 8 2 RFS 13150F ESC ENT M8...

Страница 68: ...F Power Supply and Matching Box 60 M8 60Kg Figure 8 3 RFS 13200F...

Страница 69: ...F Power Supply and Matching Box 61 Figure 8 4 RFS 27400F...

Страница 70: ...F Power Supply and Matching Box 62 Figure 8 5 MBX 13100F...

Страница 71: ...AUTION AieE a abave Aue o iXi Oe uAalaWe e Ae eReT A e e eoeUe eae emoFeAe e e e eouB Confirm whether a screw is firmly tight after you change tap position ELECTRIC SHOCK e od Ai eE DANGER eUi 16 6 AM...

Страница 72: ...F Power Supply and Matching Box 64 Figure 8 7 MBX 13200F 30Kg N P 3 6 16 6 2 PT3 8 AIR DET OUT INLET OUTLET MB SIGNAL AMC IN EIA1 5 8 2 M6 RF IN Inter lock...

Страница 73: ...F Power Supply and Matching Box 65 Figure 8 8 MBX 27400F 2 M6...

Страница 74: ...Power Supply and Matching Box 66 Figure 8 9 AMC 9L AMC 9LT AUTO ALM ESC ENT MATCH TUNE MATCH 0 99 MANUAL RESET MATCHING CONTROLLER TUNE 99 0 NP GND AC 100V FLASH RS 232C DET IN AMC OUT AMC EXT PRESET...

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