ULVAC CRYOGENICS INCORPORATED
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(For the system with IM-120)
(1) Turn off the RUN/STOP switch of EMP-14A.
(2) Check that the supply pressure of dry air is 0.5 MPa or above.
(3) When the nitrogen gas pressure is 0.2MPa and flow rate is 10NL/min, turn ON
the EMP-14A RUN/STOP switch to restart.
8.6 Emergency off
In case of an emergency, press the emergency off button on the front panel to
disconnect the control power supply and stop all the operation of EMP-14A.
To restore, turn the emergency off button to the right.
CAUTION
An emergency shutdown might damage the equipment. Do not use this button
except in emergency.
