ULVAC CRYOGENICS INCORPORATED
15
5. Utilities
5.1 Power source (for EMP-14A)
Voltage
: 200VAC±10%, three-phase
Power capacity
: 20A or more
Power consumption
: 1.7/2.0 kW (50/60 Hz)
Connection
: Round type crimping terminal for M5
5.2 Power source (for the use with GN-10i)
Voltage
: 100VAC±10%, single-phase
Power capacity
: 15A or more
Power consumption
: Approx.400W (50/60 Hz)
Connection
: 3 prong plug
5.3 Dry air for IM-120 (when using IM-120)
Pressure
: 0.5MPa – 1.0MPa
Flow rate
: 120L/min or more
Dew point
:-17
°
C or below (at atmospheric pressure)
Air requirement
: Oil-free
Note1:
Use compressors equipped with air dryer.
Note2:
Supply dry air continuously.
Use D-type earth ground for safety.
CAUTION
Use D-type earth ground for safety.
CAUTION
