ULVAC CRYOGENICS INCORPORATED
R-1
Revision History
Date
Revision
No.
Contents
2014 / 09 / 30
2015 / 08 / 04
2016 / 09 / 13
2017 / 02 / 22
2019 / 10 / 07
2014.09
2015AT01
2016SR02
2017FY03
2019OR04
First edition
The model of PSA nitrogen gas generator has been
changed.
The format for Warnings and Cautions has been changed.
“Disposal Considerations” has been added.
15. Warranty
Company address has been changed.
“Safety Instructions” has been changed.
The model name of the compressor unit has been changed.
The temperature indicator has been modified as optional.