ULVAC CRYOGENICS INCORPORATED
13
3. Flow Diagram
<Note> The configuration may differ depending on the customer specifications.
Figure 3-1 Flow Diagram
ＬＶ
－２
ＳＶ
－１
ＳＶ
－２
φ６
×
ｔ１
Ｐ
Con
tro
lC
irc
uit
Te
mp
er
at
ur
e
In
di
ca
to
r
（
TI
）
:
Op
ti
on
al
Pr
es
su
re
Me
te
r
Pre
ssu
re
Rel
ief
Val
ve
Fle
xib
le
Hos
e
LN2
Dis
pen
se
Amb
ien
tT
emp
era
tur
eS
ole
noi
dV
alv
e
Pre
ssu
re
Con
tro
lV
alv
e
Col
dhe
ad
Cab
le
Hel
ium
Gas
Tub
e
Hel
ium
Com
pre
sso
r
N2
Ga
s
Ge
ne
ra
to
r
（
Pol
yur
eth
ane
Res
in
）
Pow
er
Cab
le
Powe
rCa
ble
Remo
teC
able
Cry
oge
nic
Sol
eno
id
Val
ve
(Ma
nua
l)
Sh
eat
hed
The
rmo
co
upl
e:
Opt
ion
al
