20
ULVAC CRYOGENICS INCORPORATED
7. Electric Wiring
Figure 7-1 Electric wiring-1 EMP-14A
Ｘ
１
NF
PW
S
EL
B
PL
C
E-
S
F-
1,
2,
3
LD
C
R1
PB
L1
,4
PB
L3
PB
L2
PB
1,
3
PB
2
PL
1,
2
LI
C1
PB
L5
PL
3
C2
R-
R
TI
C
1
2
3
4
P2
4V
01
0
0.
5
SQ
5
6
P2
4V
R2
GS
T1
GS
T2
RE
F1
０
．
６
μ
Ｆ
０
．
８
５
μ
Ｆ
RE
F3
RF
4
Ｒ
－
Ｒ
C1
(5
0H
z)
RF
2
RF
1
R1
R1
C2
(6
0H
z)
Ｙ
１
0.
75
SQ
(A
)
(
Ｂ
)
(
Ｃ
)
Ｅ
EL
B
2
SQ
0.
75
SQ
NF
PW
S
24
V
0V
24
VA
F1
(3
A)
F2
(3
A)
F3
(2
A)
R
T
X2
Y2
+
-
L
N
X1
Y1
S
PL
C
LD
C
LI
E-
S
L+
P2
4V
24
V
0V
1
2
11
12
+
-
DC
-
DC
+
3
19
7
TI
C
24
V
0V
R0
T0
S0
X1
Y1
L-
15
04
R1
ST
R1
ST
R2
A
B
0.
5S
Q
P2
4V
01
1
0.
5S
Q
1
2
SV
1
SV
2
R2
Na
me
Sy
mb
ol
Ea
rt
h
Le
ak
ag
e
Br
ea
ke
r
Te
rm
in
al
Co
ve
r
No
is
e
Fi
lt
er
Po
we
r
Su
pp
ly
Pr
og
ra
mm
ab
le
Co
nt
ro
ll
er
Ca
pa
ci
ta
nc
e
Le
ve
l
Me
te
r
Co
nv
er
te
r
Le
ve
l
In
di
ca
to
r
Te
mp
er
at
ur
e
In
di
ca
to
r
Em
er
ge
nc
y
Of
f
Sw
it
ch
Fu
se
Ho
ld
er
Re
la
y
Re
la
y
Li
gh
ti
ng
Bu
tt
on
Li
gh
ti
ng
Bu
tt
on
Li
gh
ti
ng
Bu
tt
on
Li
gh
ti
ng
Bu
tt
on
Bu
tt
on
Sw
it
ch
Bu
tt
on
Sw
it
ch
In
di
ca
to
r
Li
gh
t
In
di
ca
to
r
Li
gh
t
Co
nd
en
se
r
Co
nd
en
se
r
Re
si
st
er
Cr
yo
ge
ni
c
So
le
no
id
Va
lv
e
Cr
yo
ge
ni
c
So
le
no
id
Va
lv
e
Co
ld
he
ad
Co
nn
ec
to
r
(E
xt
er
na
l)
In
te
rn
al
Ｇ
Ｎ
Re
mo
te
Ca
bl
e
Ｇ
Ｎ
Re
mo
te
Co
nn
ec
to
r
Co
mp
re
ss
or
Po
we
r
Ca
bl
e
Co
mp
re
ss
or
Un
it
Ea
rt
h
Ba
r
CO
MP
.
Re
mo
te
Co
nn
ec
to
r
CO
MP
.S
ig
na
l
Co
nn
ec
to
r
CO
MP
:
Si
gn
al
Ca
bl
e
CO
MP
.
Re
mo
te
Ca
bl
e
