ULVAC CRYOGENICS INCORPORATED
5
1. General Description of the System
1.1 Liquid nitrogen generator
（
EMP-14A
）
EMP-14A Liquid Nitrogen Generator provides liquid nitrogen by cooling down,
condensing and liquefying nitrogen gas with the cold head (Model:S050).
Liquid nitrogen is stored in the dewar, and can be dispensed to another container
with easy operation. With the optional automatic transfer system, liquid nitrogen
can be automatically transferred to the dewars of customers’ equipments.
Nitrogen gas source can be selected from two types; (1) PSA nitrogen generator,
(2) Membrane nitrogen generator.
Liquid nitrogen generator is hereafter referred to as “EMP-14A” in this manual.
1.2 Helium gas compressor (model:SA115-C)
This unit is mounted in the lower part of EMP-14A, compress Helium gas and
supply to the cold head to provide cryogenic temperatures
.
It is automatically
turned on and off by the control circuit of EMP-14A.
Helium gas compressor is hereafter referred to as “SA115-C” in this manual.
For details of this equipment, please refer to the operation manual for “SA115-C”.
1.3 PSA (Pressure Swing Adsorption) Nitrogen Generator (type GN-10i)
PSA Nitrogen Generator GN-10i generates highly concentrated nitrogen from air
using adsorber and supply the gas to EMP-14A. The nitrogen generated here is
used as the material for liquid nitrogen and is also used to take out liquid nitrogen.
PSA nitrogen generator is hereafter called “GN-10i” in this manual. When we
describe things that are in common with membrane nitrogen generators, they are
collectively referred to as “nitrogen generators”.
Please refer to the operation manual of GN-10i for details.
1.4 Membrane Nitrogen Generator (type IM-120)
Membrane Nitrogen Generator IM-120 takes in dry air from user’s equipments
and generates highly concentrated nitrogen with membrane separation
technology. The nitrogen generated here is used as the material for liquid nitrogen,
and is also used to dispense liquid nitrogen.
Membrane nitrogen generator is hereafter called “IM-120” in this manual. When
we describe things that are in common with PSA nitrogen generators, they are
collectively referred to as “nitrogen generators”.
Please refer to the operation manual of IM-120 for details.
