Ulvac CRYO-U12H, Инструкция по эксплуатации

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CRYO-U ® Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED 8-5
WARNING
The following are the recommended maintenance procedures of the pressure relief valve.
This maintenance is required once or twice a month. Confirm the safety of the gases
exhausted into the cryopump before beginning the maintenance, since the inner kit in the
cryopump is exposed to atmosphere when cleaning the pressure relief valve.
１．
Remove the cap from the pressure relief valve.
２．
Clean the pressure relief valve and the cap using the cloth moistened with alcohol.
Reinstall the valve and the cap after they dry.
３．
It is recommended that you replace O-rings on a regular basis as they deteriorate over
time
◆
Maintenance of heater for regeneration
(Applicable only to a cryopump system with heater)
Periodical maintenance is required as shown in Table 8-1.
Heaters for regeneration, both sheathed type and cartridge type, have a possibility of
deterioration of nonconductivity with age. Be sure to install a ground-fault circuit interrupter,
and conduct periodic inspections of the nonconductivity to prevent a short circuit.
8.4. Charging Helium Gas
When charging helium gas, equipments (regulators, charging hoses) that can be used at
2.0MPaG or above are required.
If the helium pressure gauge of the compressor unit shows 0 MPaG, contamination caused by
air or moisture may occur in the system. If it occurs, contact our Service Engineering Division
or customer support center.
When helium gas pressure is lowered, it is necessary to replenish the gas. Investigate the
cause of the pressure reduction before adding helium gas. If there is a leakage, take an
adequate measure before charging. Improperly connected self-sealing coupling might be
one of the causes of the leakage.
◇
Recommended regulator is the one designed for helium gas (left-hand thread) and has
CAUTION