Ulvac CRYO-U12H, Инструкция по эксплуатации

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MA0S001E,2014FY03 ULVAC CRYOGENICS INCORPORATED S-1
Safety Instructions
The following precautions contain information regarding to safety of handling CRYO-U
®
Cryopump. For employing it correctly and safely, please read these precautions carefully and
fully understand them before designing and setting up your entire pumping system with the
cryopump.
The cryopump is a pump of the type that captures gases and accumulates them up. In
the warm-up process during regeneration, the captured gases vaporize again and the
pressure in the cryopump is raised. The pressure changes depending on the kinds and the
amounts of the gases captured, as well as the size of the cryopump. For example, when
Argon is pumped up to its pumping capacity shown in the catalog, it becomes several
MPaG
when converting into gas
in the condition of the pump sealed up. To prevent an
explosion and/or destruction, CRYO-U
®
cryopump is provided with a pressure relief valve
which releases the increasing pressure.
The spring of the pressure relief valve is set to 10~20kPaG, and the valve opens when
the internal pressure exceeds this. Therefore please do not close the outlet of the pressure
relief valve, not strengthen the spring of the pressure relief valve, or not use it for other
purpose (for example, as a roughing port or a gauge port) because it is extremely
dangerous.
For handling the pressure relief valve, take notice to the following matters as well;
☆
While the pressure relief valve is working, dust in the cryopump may cause a
leakage by sticking to the valve sheet. Clean the valve each time if used under
the condition that the pressure relief valve works at the time of regeneration. In
addition, remove and clean the valve regularly to avoid sticking of O-ring even
when it does not work.
☆
For discharging a toxic or flammable gas, the quantity of captured gas should
be monitored and controlled so that the pressure relief valve should not open
at the time of regeneration. Also, it is surely required to install an exhaust duct
which is connected to the pressure relief valve in order to process the gas
safely. If using a toxic or flammable gas, please consult with us when
1. Pressure Relief Valve