Ulvac CRYO-U12H, Инструкция по эксплуатации

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CRYO-U ® Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED 5-5
val ich controls the cryopanel temp used as the
T
(Guideline Quantity to the Air)
M
Maximum quantity of sucked gas spontaneously
Lim or less
ue wh erature not to exceed 20K is
maximum allowable crossover pressure.
The maximum quantity of sucked gas which is instantaneously processable varies with
the heat load on the cryopump and the quantity of the gas condensed in the cryopump.
(Refer to Table 5-2.)
able 5-2 Maximum Quantity of Sucked Gas Processable by Cryopump
odel processable (Pa•L)
it quantity for the temperature of 20K
CRYO-U12H,U12HSP,U12HL 40000
[Example] When U12H is used and the m
allow ed as follows
† For reference †
In order to restrict the stored quantity of gas an the regeneration cycle, it is
rec control the actual crossover pressure to 40Pa or less.
vacuum chamber volume is 100L, the maximu
able crossover pressure is calculat
d extend
ommended to
Maximum allowable crossover
pressure (Pa)
≦
1
=
40000 （ Pa ･ L ）
00
（
L
）
400
（
Pa
）