Ulvac CRYO-U12H, Инструкция по эксплуатации

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Operation
5-4 ULVAC CRYOGENICS INCORPORATED
２．
When the pressure of vacuum chamber has reached 40Pa, close the roughing valve
（
RV2
）
and then turn off the roughing pump.
ommended to add a fore-line trap in
３．
for fine pumping the chamber by the cryopump.
４．
he required value, proceed
o reach
If the abnormal rise of the pressure in the s out during operation, the
cryopump case may dew. It may cause short- trical device is put under the
If you use an oil-sealed rotary pump as a roughing pump, and rough pumped for a
long time at the pressure of 40Pa or less, it is rec
the rough pumping line.
To determine the crossover pressure, refer to Section 5.6.
Open the main valve
（
V1
）
When the pressure of the vacuum chamber has reached t
with vacuum process such as deposition or sputtering. The time required t
the intended pressure depends on the volume, contents, and the wall conditions of
the chamber, etc.
chamber break
circuit if an elec
cryopump. Be careful about the operating condition of equipment, and surrounding safety.
5.6 Crossover
Crossover pressure is pressure (rough essure) of the vacuum chamber immediately
before opening the main valve to evacuate the vacuum chamber by cryopump after
um chamber. The maximum allowable roughing pressure in this case is
The sucked gas e
mp c ation performance. Normally, a
CAUTION
ing pr
roughing the vacu
called the maximum allowable crossover pressure. The moment the main valve is opened,
the gas of the vacuum chamber is flowed into the cryopump and evacuated, but when the
flow rate of the gas exceeds the limit, cryopump cannot restore its evacuation performance,
and it gets hot and expels the gas evacuated so far.
The maximum allowable crossover pressure can be obtained by the following formula.
[Calculation formula]
Max. quantity of sucked gas instantaneously
processable (Pa
•
L)
Maximum allowable crossove
Volume of vacuum chamber (L)
r
pre )
≦
ssure (Pa
maximum quantity of which is instantaneously processable is given by th
an restore the evacu limit value at which the cryopu