Ulvac CRYO-U12H, Инструкция по эксплуатации

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Operation
5-6 ULVAC CRYOGENICS INCORPORATED
WARNING
5.7 Shutdown Procedures
１．
Close the main valve
（
V1
）
.
２．
Turn off the compressor unit and the refrigerator to exhaust gases in the cryopump in
accordance with the regeneration procedures described in Section 6.
３．
It becomes at the normal temperature in the cryopump, the exhaust of gases is completed
and the cryopump will be in the state of a stop.
４．
If you continue to conduct inspection, replacement, or repair of the cryopump, turn off
the main power supply and stop circulating the cooling water before beginning the work
required.
Maintain a better condition for cryopump so that it can work any time when needed.
◆
After the shutdown of cryopump, proceed with warm-up and rough pumping which are
parts of regeneration process in order to maintain the cryopump in a clean vacuum.
Refer to Clause 3. Proceed with regeneration right after the cryopump stops in the
Safety section.
5.8 Handling of Hazardous Materials
◆
When pumping toxic gas, corrosive gas, combustible gas, or explosive gas, please be sure
to take sufficient safety measures based on respectively required statute(s) and rule(s),
and put it into effect under the user's responsibility.
In addition, be careful not to exceed atmospheric pressure with those gases during
regeneration.
Please refer to Safety Instructions for these hazardous gases.
◆
When transporting the cryopump which exhausted the hazardous materials, please take
appropriate disposal according to the regulation system of each area and a country.
CAUTION