Ulvac CRYO-U12H, Инструкция по эксплуатации

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Maintenance
Table 8-1 Maintenance Parts and Intervals
S: Scheduled maintenance U: Unscheduled maintenance or part replacement at fault
Item Parts Interval Remarks
Cryopump
U
U
U
80K baffle
15K cryopanel
replacement
Cryopump cleaning
15K cryopanel At fault
When
reassembling,
be sure to use
new indium
gasket.
S
Insulation properties of
heater for regeneration (*)
Heater Every month
Replace when
10M Ω or less
S
Pressure relief valve
Pressure
relief valve
Once or twice a month
Confirm the
safety of
exhaust gas
U
Calibration of cryometer
MBS-C
Cryometer
At fault
Use the (paid)
calibration
service.
Refrigerator unit R20R
R20
RM20
S
S
S
S
Seal kit replacement
Driver assembly
Replacement
Motor bearing replacement
Cylinder bolt replacement
Seal kit
Driver bearing
Valve bearing
Set screw
Motor bearing
cylinder bolt
12,000h 16,000h
The maintenance
cycle depends on
the manner of
operation.
S
Displacer replacement 1
st
/2
nd
stage of
displacer
12,000h 16,000h
S
Valve body replacement Intake/Exhaust
valve body
At fault At fault
U
Other parts replacement Other parts At fault
Compressor unit
S
Adsorber replacement
Adsorber Refer to the compressor unit instruction manual.
(*1): Only applicable to a cryopump system with heater.
8-2 ULVAC CRYOGENICS INCORPORATED