Ulvac CRYO-U12H, Инструкция по эксплуатации

Страница: 29 / 102

CRYO-U ® Cryopump Instruction Manual
1-3 ULVAC CRYOGENICS INCORPORATED
1.3 Environmental Requirements
Condition Requirement
Temperature when in
operation(*1)
10 - 35 °C
Temperature when not in
operation
-10 - 55 °C
Humidity (*1) 5
～
85% (non-condensing)
Altitude < 1000m
Atmosphere
Free from metallic powder, dust, combustible gas, or
corrosive gas
(*) Depending on the ambient temperature and humidity, dew condensation may form
on an operating cryopump as the surface of the pump case becomes colder than the
dew-point (Refer to “Appendix F Dew Point Temperature”). Use an air conditioner to
control temperature and humidity to prevent condensation.
◆
Thermometer
・
MBS-C CRYO METER
・
Hydrogen Vapor Pr
mp.
K thermocouple Electromotive Force
：
Approximate 0mV at 20
℃
essure Gauge
Charged Pressure
：
0.35
±
0.02MPaG at room te
・
◆
Accessory Flange(C-type)
φ
44.5
φ34.9
φ22
2.
17
1.25
7
４－φ４．５ hole
O ring ＡＳ５６８－０２０