Ulvac CRYO-U12H, Инструкция по эксплуатации

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CRYO-U
®
Cryopump Instruction Manual
4.6 Connecting Cooling Water Pipe
CAUTION
CAUTION
Regarding cooling water of the compressor unit, observe the cooling water standard quality
which is shown in the compressor unit instruction manual.
１ .
Connect cooling water pipe to the compressor unit. The connector thread size for both
“COOLING WATER IN” and “COOLING WATER OUT” is Rc 3/8 female pipe thread.
２．
Be careful not to mistake the inlet for the outlet.
３．
Run the cooling water with the actual flow conditions, and make sure that there is no water
leakage.
Please read the compressor unit instruction manual for more information on the connecting method
or the requirements for water pressure and flow rate.
4.7 Connecting the Cryopump to the Compressor Unit
(Connecting Flexible Hose)
・ Read the handling notes in appendix B about the connection of the flexible hoses.
・ When connecting flexible hoses, always use two single open end spanners with width
across flat 26mm and 30mm.
・ Do not forcibly bend flexible hoses. They may be damaged and cause helium leakage.
・ Do not connect or disconnect self-sealing coupling frequently. It may cause gas leakage.
If there is a leakage, you may have to replace it with a new one according to the situation
of the occurrence of leakage.
１．
Remove all dust plugs and caps from supply and return flexible hoses, compressor unit
and cryopump. Clean flat rubber gaskets on the self-sealing couplings to be free from
dust or metallic powder.
２．
Connect the flexible hoses between the compressor unit and the cryopump as follows
(see Figure 4-5):
a. Connect one end of the “SUPPLY” labeled flexible hose to the helium-gas SUPPLY
connector on the compressor unit, and connect the other end of the hose to the
ULVAC CRYOGENICS INCORPORATED 4-7