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©2004 TESA Switzerland All Rights Reserved.
Page A-10
User's Manual
MH3D
CCD Optical Probe - Measuring
The optical probe is used primarily to perform measurements in the X-Y plane.
Heights of features in the Z-direction can also be measured. To do this:
1. From the Main Menu, select "Measurements".
2. Focus the probe on the top plane of the feature and take at least 3 measure-
ment points. Press "Done". Verify that the system has solved for a plane. If
not, use the "Change Feature Type" softkey to solve for a plane.
3. Focus on the bottom plane of the feature and take a single measurement
point. Press "Done".
4. Select the "Relationship Mode" softkey to view the Perpendicular Distance
screen.
or,
1. From the Main Menu, select "Height Gage".
2. Select the "Z-Axis" softkey.
3. Focus the probe on the top plane of the feature and take a single measure-
ment point. Press "Done".
4. Focus on the bottom plane of the feature and take a single measurement
point. Press "Done".
5. The lower section of the screen now displays the distance along Z.
Use the highest practical magnification during this procedure for the best
accuracy.
Содержание MH3D
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Страница 17: ...User s Manual MH3D 2004 TESA Switzerland All Rights Reserved Page 2 1 CHAPTER 2 Construction Construction ...
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Страница 34: ... 2004 TESA Switzerland All Rights Reserved Page 2 18 User s Manual MH3D Cables Power supply Printer ...
Страница 35: ...User s Manual MH3D 2004 TESA Switzerland All Rights Reserved Page 3 1 CHAPTER 3 Operation Operation ...
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Страница 54: ... 2004 TESA Switzerland All Rights Reserved Page 3 20 User s Manual MH3D Useful Probe Dimensions TESASTAR_i ...
Страница 56: ... 2004 TESA Switzerland All Rights Reserved Page 3 22 User s Manual MH3D MH3D Notes ...
Страница 57: ...Page 4 1 2004 TESA Switzerland All Rights Reserved User s Manual MH3D CHAPTER 4 Maintenance Maintenance ...
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Страница 69: ...User s Manual MH3D 2004 TESA Switzerland All Rights Reserved Page 5 1 CHAPTER 5 Glossary Glossary ...
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Страница 92: ... 2004 TESA Switzerland All Rights Reserved Page 5 24 User s Manual MH3D MH3D Notes ...
Страница 93: ...User s Manual MH3D 2004 TESA Switzerland All Rights Reserved Page A 1 CHAPTER A Appendix Appendix ...
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