Rigaku 2080A211, Инструкция по эксплуатации, Страница: 98 / 115

Sample Plates
90
SmartLab: Automated Multipurpose X-ray Diffractometer
Table Wafer sample plates
Name Illustration
4-inch wafer sample plate
(option: 2680A301)
6-inch wafer sample plate
(option: 2680A302)
8-inch wafer sample plate
(option: 2680A303)
4-inch wafer sample plate
(for 18-21 mm)
(option: 2680A301)
4-inch XY mapping sample plate
(provided with XY-4”
φ
attachment)
4-inch XY mapping sample plate
(for 6-9 mm)
(option)
Table List of possible combinations of attachment, sample spacer, and sample plate
Attachment Sample spacer Sample plate
Measurable
sample thickness
0-3 mm
3-6 mm
6-9 mm
9-12 mm
12-15 mm
15-18 mm
(black stamped
mark)
4-inch wafer sample plate
6-inch wafer sample
plate(*1)
8-inch wafer sample
plate(*1)
0-3 mm
3-6 mm
6-9 mm
9-12 mm
12-15 mm
15-18 mm
4-inch wafer sample plate (for 18-21 mm) 18-21 mm
4-inch wafer sample plate
6-inch wafer sample plate(*1)
Standard attachment
RxRy attachment
XY-20 mm attachment
8-inch wafer sample plate(*1)
21-24 mm
0-3 mm
3-6 mm
(blue stamped
mark)(*2)
4-inch area mapping sample
plate
0-3 mm
3-6 mm
4-inch XY mapping sample plate (for 6-9 mm) 6-9 mm
XY-4"
φ
attachment
4-inch XY mapping sample plate 9-12 mm
*1: Both X and Y must be 0 mm when the sample is placed on the XY-20 mm attachment.
*2: When the XY-4”
φ
attachment is used, the thickness indicated by the blue stamp mark on the sample spacer is valid.