Rigaku 2080A211, Инструкция по эксплуатации

Страница: 106 / 115

Examples of Sample Mounting
98
SmartLab: Automated Multi Purpose X-Ray Diffractometer
Wafer-shaped samples
Use a 4-inch wafer sample plate, 6-inch wafer sample plate, or 8-inch wafer
sample plate to measure wafer-shaped samples.
Wafer-shaped sample
When placing or removing the sample, we recommend removing the sample plate and
sample spacer from the attachment. When removing the sample plate and sample spacer, we
recommend setting the chi axis to 0
°
and positioning the sample horizontally.
Place the sample at the center of the sample plate. Use the magnets provided to
hold the sample in place. The magnets can be used with samples that are up to 3
mm thick. For information on measuring samples thicker than 3 mm, see
Bulk
samples .
CAUTION
Placing a sample larger than the sample plate may result in damage to the
sample during measurement.
Place an 8-inch wafer on the center of the 8-inch wafer sample plate; because the
space available for the magnets securing the sample in place is small. Be careful
while measuring of 8-inch wafers, because increasing the tilt axis (chi axis) can
cause the wafer to bend under its own weight.