Panasonic AJ-YA120AG, Руководство по обслуживанию

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MECH-21
Waving Measurement Procedures
1. Press “SPACE” key to perform the Peak Hold in 30 seconds while linearity is displayed.
2. After sampling the Peak Hold, press “SHIFT” and “ } ” key simultaneously on the Key Board, then the
numerical values of “Linearity” and “Waving” are displayed. Confirm that the numerical values are in the
specification. Also confirm that the waving level is almost equal from the entrance to the exit side. If the
“Linearity” or “Waving” is out of specification, adjust height of S2 or T2 post.
3. Press the ESC key to return to the main menu.
Confirm this value
Linearity: 2.0um
Waving : 2.2um
Sensitivity: 103.2mV /um
(92.4mV/um 114.0mV/2.2um)
When a waving value is more than 1.5um.
Max Line
Min Line
Confirm this value
When a waving value is less than 1.5um.