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MKS 146C, Инструкция по эксплуатации

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List of Tables

xix

Table 64:  Dual Channel Setup Messages ................................................................................266

Table 65:  Chapter References for Dual Channel Setup Messages ............................................266

Table 66:  Alarm Messages .....................................................................................................267

Table 67:  Chapter References for Alarm Messages .................................................................267

Table 68:  Analog Output Messages ........................................................................................269

Table 69:  Chapter References for Analog Output Messages ....................................................269

Table 70:  General Control Messages ......................................................................................270

Table 71:  Chapter References for General Control Messages ..................................................270

Table 72:  Control Adjust Messages ........................................................................................271

Table 73:  Chapter References for Control Adjust Messages....................................................271

Table 74:  Recipe Specific Messages .......................................................................................272

Table 75:  Chapter References for Recipe Specific Messages...................................................272

Table 76:  Miscellaneous Messages .........................................................................................273

Table 77:  Chapter References for Miscellaneous Messages.....................................................274

Table 78:  Read Only Data Messages ......................................................................................276

Table 79:  Response Format for Read Only Data Messages .....................................................277

Table 80:  Chapter References for Read Only Data Messages ..................................................278

Table 81:  Response to a Power Up Status Message ................................................................282

Table 82:  Read Only Status Messages ....................................................................................283

Table 83:  Response Format for the Read Only Status Messages .............................................283

Table 84:  Chapter References for Read Only Status Messages ................................................286

Table 85:  Error Code Summary ..............................................................................................287

Table 86:  Voltage Range and Fuse Selection ..........................................................................290

Table 87:  Diagnostics Code 4 Key Press Results ....................................................................294

Table 88:  Hexadecimal Values Assigned to General I/O Connector Input Bits........................297

Table 89:  RS-232 Error Code Summary .................................................................................305

Table 90:  Description of Front Panel Error/Status Messages...................................................307

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Содержание 146C

Страница 1: ...derutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos In s...

Страница 2: ...uum Gauge Measurement and Control System Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksinst com Artisan Technology G...

Страница 3: ...ve and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shal...

Страница 4: ...120598 P1 Rev B 3 99 MKS Type 146C Cluster Gauge Vacuum Gauge Measurement and Control System 0 1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 5: ...ents Inc Printed in the United States of America Baratron is a registered trademark and Cluster Gauge is a trademark of MKS Instruments Inc Andover MA Swagelok VCR and VCO are registered trademarks of...

Страница 6: ...l appareil 10 Mesures de s curit et mises en garde 11 Informaci n sobre seguridad 13 S mbolos usados en el manual de instrucciones 13 S mbolos que aparecen en la unidad 14 Procedimientos y precaucione...

Страница 7: ...ine Voltage Select Switch 33 Transducer Mass Flow Controller Connections 33 Communication and Power Connections 33 Installing Boards in the 146 Unit 34 New Configuration Warning Code C11 37 146 Start...

Страница 8: ...ctor Pinout 74 The Binary Coded Decimal BCD Board 76 The RS 232 Connector 77 Overview of Modes 79 How To Tell which Mode You Are In 79 How To Change from One Mode to Another 79 Overview of the Five Mo...

Страница 9: ...ow To Toggle the Span On and Off 117 How To Calculate the Analog Set Point 118 How To Command an MFC Open Override 120 How To Command an MFC Close Override 121 How To Cancel an MFC Open Close Override...

Страница 10: ...Panel Window 152 The Various Displays in Tuning Mode 154 Tuning Mode is Used when Performing the Following Procedures 156 The Two Levels within Tuning Mode 157 Keys 159 The Deviation Indicator 160 How...

Страница 11: ...How To Configure the RS 232 Port 220 Code 7 How To Set the Display for Leakage Mode 222 Code 8 How To Edit the Data Logger Interval 224 Code 10x How To Adjust the Display Lag 226 Code 11x How To Turn...

Страница 12: ...Information 255 How To Establish RS 232 Communications 255 MKS RS 232 Protocol 256 Channel Numbering 256 General Guidelines for RS 232 Messages 258 Command Messages 259 Power Control Messages 260 Cali...

Страница 13: ...A Product Specifications 301 Physical Specifications 301 Electrical Specifications 302 Appendix B Parts List Accessories 303 Appendix C RS 232 Error Codes 305 Error Code Summary 305 Appendix D Front P...

Страница 14: ...Table of Contents xi Auxiliary Output Messages 327 Control Messages 329 Index 331 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 15: ...Table of Contents xii Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 16: ...rani Convection Board 52 Figure 17 Jumper Placement on the Hot Cathode Board 58 Figure 18 Top Fastening Screw on the Dual Thermocouple Board 61 Figure 19 Jumper Placement on the Thermocouple Board 61...

Страница 17: ...ition 162 Figure 46 Adjusting the Base Valve Position 164 Figure 47 Adjusting the Start Valve Position 166 Figure 48 Adjusting the Integral Value 168 Figure 49 Adjusting the Preset Valve Position 170...

Страница 18: ...play 234 Figure 78 Code 15x Display 236 Figure 79 Graph Showing Analog Set Point Defaults 237 Figure 80 Code 16x Display 239 Figure 81 Code 17x Display 241 Figure 82 Code 18x Display 245 Figure 83 Con...

Страница 19: ...List of Figures xvi Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 20: ...xial Connector Pinout 55 Table 15 Hot Cathode Sensors and Cables 55 Table 16 Hot Cathode Type D Connector Pinout 56 Table 17 Thermocouple Connector Pinout 59 Table 18 Cabling Information for the Therm...

Страница 21: ...etup Mode Codes 184 Table 47 Setup Mode Procedures 185 Table 48 Setup Mode Functions 186 Table 49 Sensor Calibration Parameters for Each Channel Type 190 Table 50 Default Values for Dual Channel Displ...

Страница 22: ...3 Table 77 Chapter References for Miscellaneous Messages 274 Table 78 Read Only Data Messages 276 Table 79 Response Format for Read Only Data Messages 277 Table 80 Chapter References for Read Only Dat...

Страница 23: ...List of Tables xx Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 24: ...performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correctly performe...

Страница 25: ...5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No 5033 a Class ll equipment IEC 417 No 5172 a Thre...

Страница 26: ...grounded through the grounding conductor of the power cord To avoid electrical shock plug the power cord into a properly wired receptacle before connecting it to the product input or output terminals...

Страница 27: ...THE PROPER FUSE Use only a fuse of the correct type voltage rating and current rating as specified for your product DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES To avoid explosion do not operate this prod...

Страница 28: ...EMUKEJVKIWPI W TRGTXGTNGV WPI H JTGP MCPP 8QTUKEJV Das Symbol VORSICHT weist auf eine Gefahrenquelle hin Es macht auf einen Bedienungsablauf eine Arbeitsweise oder eine sonstige Gegebenheit aufmerksam...

Страница 29: ...19 Rahmen oder Chassis IEC 417 Nr 5020 quipotentialanschlu IEC 417 Nr 5021 Gleichstrom IEC 417 Nr 5031 Wechselstrom IEC 417 Nr 5032 Wechselstrom und Gleichstrom IEC 417 Nr 5033 a Ger teklasse II IEC 4...

Страница 30: ...t da alle Sicherheitseinrichtungen voll funktionsf hig bleiben Wartung nur durch qualifizierte Fachleute Das Geh use des Instruments darf vom Bedienpersonal nicht ge ffnet werden Das Auswechseln von B...

Страница 31: ...Pr fvermerk einer zust ndigen Pr fstelle tragen z B VDE Semko oder SEV Richtige Stromquelle verwenden Dieses Produkt ist f r eine Stromquelle vorgesehen bei der die zwischen den Leitern bzw zwischen...

Страница 32: ...KQP KPEQTTGEVG QW FG PQP TGURGEV FGU EQPUKIPGU VVGPVKQP L indication ATTENTION signale un danger potentiel Elle est destin e attirer l attention sur une proc dure une utilisation une situation ou tout...

Страница 33: ...9 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternatif IEC 417 No 5033 a Mat riel de classe II IEC 417...

Страница 34: ...areil ne doit pas enlever le capot de l appareil Le remplacement des composants et les r glages internes doivent tre effectu s uniquement par un personnel d entretien qualifi MISE LA TERRE DE L APPARE...

Страница 35: ...r une source de courant lectrique n appliquant pas une tension entre les conducteurs d alimentation ou entre les conducteurs d alimentation et le conducteur de terre sup rieure celle sp cifi e dans le...

Страница 36: ...UG EQTTGEVCOGPVG RQFT C ECWUCT NGUKQPGU C NQU GORNGCFQU 2TGECWEK P El s mbolo de PRECAUCI N indica un riesgo Pone de relieve un procedimiento pr ctica etc de tipo operativo que de no realizarse u obse...

Страница 37: ...C 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente continua y alterna IEC 417 N 5033 a Equipo de cl...

Страница 38: ...DOS Los operarios no deben retirar las cubiertas del instrumento El cambio de piezas y los reajustes internos deben efectuarlos nicamente t cnicos especializados PUESTA A TIERRA DEL INSTRUMENTO Este i...

Страница 39: ...o debe funcionar a partir de una fuente de alimentaci n el ctrica que no aplique m s voltaje entre los conductores de suministro o entre uno de los conductores de suministro y la puesta a tierra que e...

Страница 40: ...the front panel Gauges can be zeroed and spanned individually or cross calibrated for span There is an automatic ion gauge powerdown at high pressures and a sensor powerdown for cryo pump regeneration...

Страница 41: ...description of the instrument and its functionality Chapter Four Operation in Normal Mode describes how to use the instrument and explains all the functions and features Chapter Five Operation in Leak...

Страница 42: ...ed on them The key names functions are written with the key name inside straight brackets For example ENTER Most keys on the keyboard have more than one function printed on them In this manual both fu...

Страница 43: ...our areas remain fixed in the window although the information displayed in them changes The four displays are referred to as the left center right and main displays The left display is located in the...

Страница 44: ...n this manual Refer to the Table of Contents for a complete list of all functions the 146 unit can perform Parameter A parameter is a value or option you add or alter when you give a command or execut...

Страница 45: ...tain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS please obtain an ERA Number Equipment...

Страница 46: ...rs Caution Only qualified individuals should perform the installation and any user adjustments They must comply with all the necessary ESD and handling precautions while installing and adjusting the i...

Страница 47: ...power HPS hot cathode the default is for a high power gauge Labels are placed at each occupied board slot on the rear panel of the 146 unit The labels identify the channel number s and type of board...

Страница 48: ...The connectors must have a metal case which has direct contact to the cable s shield on the whole circumference of the cable The inductance of a flying lead or wire from the shield to the connector wi...

Страница 49: ...t not usually necessary Keep Wires and Braid Flat Against Case Metal Cable Clamp Screw Split Lock Washer External Tooth Lock Washer Transducer Housing Optional Plastic or Metal Cable Clamp For Physica...

Страница 50: ...CONVECTION BOARD CAPACITANCE MANOMETER MASS FLOW CONTROLLER BOARD HOT CATHODE BOARD B C D BOARD AUXILIARY OUTPUT BOARD CONTROL BOARD ANALOG BOARD Channel 1 Channel 2 C M Interface High Voltage Current...

Страница 51: ...play 2 146 displayless unit without front panel display Notes 1 Four is the maximum number of channels for the instrument 2 Channel numbers are determined by the sequence of channel boards For example...

Страница 52: ...regulatory requirements such as UL or CSA Safety Conditions The 146 unit poses no safety risk under the following environmental conditions Altitude up to 2000 m Maximum relative humidity 80 for temper...

Страница 53: ...lips Convectron gauge The HPS inverted magnetron cold cathode gauge is compatible All Bayard Alpert hot cathode gauges are supported This includes both the thoriated iridium and tungsten filament gaug...

Страница 54: ...rs referenced in parentheses 3 00 76 2 9 45 240 0 8 25 209 6 8 80 223 5 0 38 9 7 4 places 0 25 6 4 4 places POWER ON OFF 0 1 Figure 6 Front Panel Dimensions 0 50 12 7 12 09 307 1 8 00 203 2 Figure 7 T...

Страница 55: ...If you choose to supply your own power cord you must ensure that it complies with the applicable national regulatory requirements such as UL or CSA 3 Use a voltmeter to check that the maximum potenti...

Страница 56: ...d power connections 1 Connect the proper interface cable to the General I O connector 2 Connect the IBM PC XT AT or compatible computer cable to the standard 9 pin female RS 232 connector 3 If an Auxi...

Страница 57: ...lips screws on the outside corners 3 Remove the seven 7 screws from the top cover 4 Remove the cover by firmly pulling it towards the back of the unit Figure 9 Opening the Type 146 Unit 3 Remove the t...

Страница 58: ...board in slot 4 or 5 if no Control board is present If a Control board is present it is best to install the Auxiliary Output board in slot 4 8 Unscrew the two small screws holding the slot cover that...

Страница 59: ...y off center to avoid interfering with a connector if a board is positioned in slot 5 Therefore the cover must be in the correct orientation for the screw holes to line up properly 17 Carefully turn t...

Страница 60: ...er boards installed in higher numbered slots go to default values The channel numbers associated with those boards are also changed if a transducer board of any type is not installed to replace the re...

Страница 61: ...ion refer to Displayless 146 Unit page 98 146 Start Up 1 Be sure the AC power cord is disconnected 2 Push the power switch to the OFF position 3 Plug in the power cord 4 Push the power switch to the O...

Страница 62: ...des the power switch the alarm and channel label areas the keys and the front panel window All modes can be accessed through the front panel and from the RS 232 serial port All commands can be activat...

Страница 63: ...Alarms 7 A 8 B 9 C and 0 D Used to select one of the four alarms A through D QUIET CANCEL Silences any alarm as its first function Yellow Keys Relates to Channels 11 22 33 44 and 5DUAL Used to select...

Страница 64: ...the exponent of the active parameter 2 Toggles between the first and second part of an active two part parameter setting up Dual Channels The first part is the channel number and the second part is a...

Страница 65: ...to Normal Mode In Control Mode 1 Quiets any alarms 2 Toggles out of Control Mode into the previous mode 3 Returns to Normal Mode DISPLAY MODE 1 Scrolls through Normal Leakage Tuning when available an...

Страница 66: ...D LATCHED LATCHED LATCHED SET POINT LEAD GAIN OVERRANGE UNDERRANGE NO SENSOR CAN T ZERO OVERRIDE INVALID PRESET DUAL CHANNEL INTEGRAL THRESHOLD START SENSOR CAL BASE CODE TRIP POINT ANALOG END POINT F...

Страница 67: ...center and right displays do not need to have a channel number because they always display channels 1 2 and 3 respectively when in Normal or Leakage Modes Error Codes The 146 unit is able to determin...

Страница 68: ...ently editable PRESET The PRESET parameter is currently editable SET POINT The SET POINT parameter is currently editable LEAD The LEAD parameter is currently editable GAIN The GAIN parameter is curren...

Страница 69: ...valid keystroke has been used Table 7 Standard Front Panel Messages Labels on the 146 Unit The 146 unit has a serial number label and an informational label on the side of the unit The informational l...

Страница 70: ...t one Control board and one Auxiliary Output board Labels are placed on the rear panel to mark the channel number and board type of each board installed in the unit when it leaves the factory A comple...

Страница 71: ...Clock 5 Power Ground 6 15 Volts 7 15 Volts 8 Remote Zero Out of Range 9 15 Volts 10 PROM Write 11 Digital Ground 12 Signal 13 Range Identification or PROM Read 14 Bypass Remote Zero 15 Chassis Ground...

Страница 72: ...B112 2 10 CB112S 2 10 390 or 690 with a 270 Highest Accuracy CB112 6 CB112S 6 622 Absolute Transducer CB112 2 10 CB112S 2 10 623 Absolute Transducer CB112 2 10 CB112S 2 10 624 Absolute Transducer heat...

Страница 73: ...ve 2 Chassis Ground 3 Signal 4 Signal 5 Power Ground 6 Drive 7 Bridge Delta 8 Bridge Delta 9 Power Ground Table 10 Pirani Convection Connector Pinout Pirani Sensors and Cables Sensor Type Part Number...

Страница 74: ...unit 3 Remove the four 4 Phillips screws on the outside corners of the rear panel and the seven 7 screws from the top cover 4 Remove the top cover by firmly pulling it towards the back of the unit Not...

Страница 75: ...e jumper is stored on JP2 Place the jumper on JP1 for single channel configuration Place the jumper on JP2 for dual channel configuration Figure 16 Jumper Placement on the Pirani Convection Board 13 P...

Страница 76: ...cover The center screw on the bottom cover is slightly off center to avoid interfering with a connector if a board is positioned in slot 5 Therefore the cover must be in the correct orientation for th...

Страница 77: ...s Sensor and Cable Type Part Number Cold Cathode with NW 40 KF 104210001 Cold Cathode with 2 CF 104210002 Cold Cathode with 1 tube 104210003 Cold Cathode with NW 25 KF 104210004 Cold Cathode Cable 10...

Страница 78: ...t in the HC gauge it automatically turns off power to the gauge To restore power to the gauge toggle the HC channel off and on again This feature is always enabled Hot Cathode Coaxial Connector Pinout...

Страница 79: ...l Power to a Hot Cathode The 146 unit can supply a maximum of 45 watts to a hot cathode If the hot cathode is undergoing a high power degas all of the 45 watts is used for the degassing process If the...

Страница 80: ...Be sure the power cord is disconnected 2 Disconnect all cables from the 146 unit 3 Remove the four 4 Phillips screws on the outside corners of the rear panel and the seven 7 screws from the top cover...

Страница 81: ...146 unit 16 Replace the bottom cover by inserting it into the grooves provided and firmly sliding it towards the front of the unit Replace the seven 7 screws that fasten the bottom cover The center s...

Страница 82: ...ipped with a Thermocouple board cannot carry a CE mark since there are no CE compliant thermocouple gauges available Thermocouple Connector Pinout Pin Number Assignment 1 Drive 2 Drive 3 Signal 4 Driv...

Страница 83: ...3 Remove the four 4 Phillips screws on the outside corners of the rear panel and the seven 7 screws from the top cover 4 Remove the top cover by firmly pulling it towards the back of the unit Note th...

Страница 84: ...couple Board 13 Move the jumper to short pins 1 and 2 The board is now configured as a single channel Thermocouple board The top connector becomes the only active channel Note Only the top connector i...

Страница 85: ...is positioned in slot 5 Therefore the cover must be in the correct orientation for the screw holes to line up properly 21 Carefully turn the unit right side up 22 Replace the top cover by inserting it...

Страница 86: ...ment 1 No Connection 2 Signal In 3 Valve Close output active low open collector 4 Valve Open output active low open collector 5 Power Ground 6 15 Volts 7 15 Volts 8 Set Point Signal Output 9 Fault Inp...

Страница 87: ...CB147 7 Cable for MFCs w 15 pin Type D connector CB147 1 CB147S 1 Cable for MFCs w 9 pin Type D connector CB147 12 CB147S 12 Table 20 Mass Flow Controllers and Cables Note You must use the appropriate...

Страница 88: ...he Relay A and B contacts can handle up to 1A at 30 VDC Table 21 lists the pinout functions of the General I O connector General I O Connector Pinout Pin Number Assignment 1 Chassis 2 Remote Zero Chan...

Страница 89: ...neral I O Connector Pinout Remote Zero Line Function with Ion Gauges The Remote Zero lines on the General I O connector act as an On Off toggle switch for ion gauges A high to low transition on the Re...

Страница 90: ...ections and Table 23 lists the functions for the analog outputs Relay Output Top Connector Pinout Pin Number Assignment 1 6 2 Relay C NO C NC 4 9 5 Relay D NO C NC NO Normally Open NC Normally Closed...

Страница 91: ...o go to default positions Code 7x in the 146 diagnostics feature is used to determine if the Fail Safe system is operating and its response time When Code 7x is used the processor sends a relay setup...

Страница 92: ...nd 9 Chassis Ground Table 24 Control Valve Top Connector Pinout When using the Valve Drive and outputs pins 6 and 7 in Table 24 the full scale valve drive current 140 or 200 mA and the compliance volt...

Страница 93: ...nnector Pinout Pin Number Assignment 1 Analog Set Point signal 2 Set Point B 3 Set Point C 4 Set Point D 5 Digital Ground 6 Analog Set Point return 7 Open 8 Manual 9 Close Table 25 Control Interface B...

Страница 94: ...B153 13 10 CB153S 13 10 High Flow Solenoid 154 CB251 2 10 w CB 248 1 adapter CB251S 2 10 w CB 248 1 adapter Table 27 Control Valves and Cables Flow Controllers and Cables Equipment Description MKS Pro...

Страница 95: ...on a board positioned in slot 5 5 Carefully turn the unit over so that it is bottom side up and remove the seven 7 screws 6 Remove the bottom cover by firmly pulling it towards the back of the unit No...

Страница 96: ...ide up 11 Replace the top cover by inserting it into the grooves provided and firmly sliding it towards the front of the unit Replace the seven 7 screws that fasten the top cover The center screw on t...

Страница 97: ...connector Interface is passive The RS 232 connector takes precedence It will accept command messages and respond to query messages The device connected to the Interface connector can only receive RS...

Страница 98: ...re 7 Digital Ground 8 Filtered 5 Volts 9 Keyboard P4 10 Keyboard P5 11 Keyboard P6 12 Keyboard P7 13 Keyboard P8 14 Display Backlight Enable 15 Display Data U2 16 Display Data U3 17 Display Data U4 18...

Страница 99: ...ohms Data changes after the falling edge of a strobe and is valid on the strobe s rising edge The strobe pulse is approximately 5 microseconds and the BCD data is updated at a rate of 100 ms BCD Conne...

Страница 100: ...at is used for serial communications Table 32 lists the pin functions employed by this interface The RS 232 Communications chapter describes the RS 232 protocol used in the 146 unit RS 232 Connector P...

Страница 101: ...R 4 Leakage Mode TUNING HOLD 2 TORR Tuning Mode CLOSE TORR SETUP TRIPPOINT Setup Mode Torr OPEN AUTO CLOSE HOLD MANUAL TORR 4 Control Mode requires the Control Board requires the Control Board Figure...

Страница 102: ...w To Tell which Mode You Are In Refer to Figure 21 page 78 for a sample figure of each mode Each mode provides a main display and three upper displays Normal Mode The screen is not labeled Leakage Mod...

Страница 103: ...akage Mode can be used as a general system status mode or for maintenance If a system does not maintain its pressure this mode can be used to show how fast the system is leaking Normal and Leakage Mod...

Страница 104: ...ated by the TUNING legend In Tuning Mode specific control parameters can be adjusted to help fine tune the 146 unit for optimum control performance These parameters can be changed individually as the...

Страница 105: ...lines separate the modes The different colors of the wedges in the chart indicate the flow of instructions Starting at the center of the diagram you may enter any of the black wedges containing a mod...

Страница 106: ...inside the function s green colored wedge Example 3 SELECT A MODE Starting at the center of the diagram the 146 unit defaults to Normal Mode Use the DISPLAY MODE key to scroll to Tuning Mode the same...

Страница 107: ...ote 2 Disabled If source channel is Auto Off it becomes Manually Off Normal operation but Disconnected in continuous range Underranged Normal operation use default underrange pressure Normal operation...

Страница 108: ...hannel remains Manually Off Normal operation Underranged Normal operation Normal operation Normal operation Normal operation use default underrange pressure Normal operation Overranged Normal operatio...

Страница 109: ...understand how to configure the alarm relay system in the 146 unit it is necessary to understand what an alarm condition means In the 146 instrument an alarm condition exists when pressure rises abov...

Страница 110: ...igh and the relay will switch contacts back and forth as the pressure crosses above and below trip point For example assume relay B is set to be actuated during an alarm condition but the pressure is...

Страница 111: ...ears Note An alarm audio tone goes off if a gauge becomes disconnected This is not a trip point alarm condition and no relays are altered To remedy the situation reconnect the sensor and press the QUI...

Страница 112: ...nd temporarily appears in the upper right section of the front panel window C A NO SENSOR legend is displayed in the window corresponding to one of the four yellow channel numbers on the right side of...

Страница 113: ...ent channel by selecting a different control channel in Setup Mode The control system for a 146 instrument typically consists of six parts the sensor s a gas supply a control valve gas inlet or exhaus...

Страница 114: ...passes the valve position is changed Due to integration and good control the error signal approaches and is reduced to zero An increase in the integral value increases the period of time over which th...

Страница 115: ...e is a function of the pump speed chamber volume and valve size Pump Choking Choking is a situation that sometimes occurs and is the result of a peculiarity of all diffusion pumps If too much gas is i...

Страница 116: ...nel to a fixed flow rate of 20 sccm The totaling MFC will subtract 20 flow rate of the co channel from 100 the set point and adjust its voltage to produce a flow rate of 80 sccm Therefore the total fl...

Страница 117: ...alculates the control signal for each MFC MFC 1 7 5 Volts 10 0 375 Volts MFC 2 7 5 Volts 30 1 125 Volts MFC 1 7 5 Volts 60 2 25 Volts The total control signal is 3 75 Volts 75 of 5 Volts Pressure Meas...

Страница 118: ...tripped state actuated or deactuated Control Data Recipe Data for each recipe Softstart value Base value Alpha value Start value Polarity setting Preset value Integral value Set point value Softstart...

Страница 119: ...point full scale pressure Communications Data Dual Channel Data for Displays Data logger interval Baud rate Communications mode parity data bits stop bits Protocol MKS 146 or data logger Upper thresh...

Страница 120: ...pressure threshold Ion Gauge Disconnect Threshold Setup Mode Sensor Calibration screen CC and HC The ion gauge disconnect threshold feature sounds an alarm and changes the gauge s reading to E0 when t...

Страница 121: ...l and an RS 232 connector located on the rear panel Both connectors support RS 232 communication between the 146 unit and a computer However the 146 unit only accepts command messages through one port...

Страница 122: ...nd changes to green within a few seconds If more than one non fatal error condition was detected such as codes C11 E4 or E10 the LED remains lit The error code can be displayed or queried through RS 2...

Страница 123: ...panel Interface connector Pins 1 through 5 7 8 and 20 on a displayless unit s front panel are involved with RS 232 communications Pins 4 and 8 are especially worth noting If pin 4 is left open the de...

Страница 124: ...ANUAL as well In our example the valve control state is set to HOLD Torr m HOLD 4 mTORR LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY The pressure reading from the gauge on channel 1 is shown here The pre...

Страница 125: ...ating the zero once a sensor has been zeroed Span a Pirani Sensor to Atmosphere Sets the upper pressure reading of a Pirani sensor equal to 760 Torr or Atmosphere Atm whichever is applicable Span a Se...

Страница 126: ...RIGHT DISPLAY MAIN DISPLAY The pressure reading from the gauge on channel 1 is shown here The pressure reading from the gauge on channel 2 is shown here The pressure reading from the gauge on channel...

Страница 127: ...single channel s pressure readout Two dual channel setups can be configured Dual Channel 1 and Dual Channel 2 The same channel can be used in both setups For example if Dual Channel 1 switches the mai...

Страница 128: ...his example the gauges on channels 1 and 4 make up the dual channel display Figure 27 Dual Channel Display in Normal Mode In a dual channel display pressure information is shown for a single channel o...

Страница 129: ...meters which are in contact with a cryo pump during regeneration procedures The gauges may cause an explosion if they are not powered down Turning a capacitance manometer or mass flow controller MFC o...

Страница 130: ...y scrolling through modes 2 Press the ON LEAD or OFF GAIN key followed by A B C or D The system responds by enabling press ON LEAD or disabling press OFF GAIN the selected alarm Note Alarms A and B ar...

Страница 131: ...ero pressure The zero is adjusted by varying the power until a standard output voltage is achieved Actual Pressure or other measured parameter 0 Zero should be lowered Zero should be raised Good Zero...

Страница 132: ...scale range of the MFC For example to zero a 10 sccm unit the reading must be 0 0 1 0 sccm 1 Pump the gauge down to a pressure below the resolution of the gauge 0 5 mTorr for a TC gauge For an MFC en...

Страница 133: ...t complete the zeroing itself a CAN T ZERO message is momentarily displayed and the 146 unit completes the zeroing provided the 120 gauge is within 0 8 V of zero 6 TC gauges must be zeroed when used f...

Страница 134: ...itance Manometer 0 8 Volts to 0 8 Volts Linear Capacitance Manometer 0 3 Volts to 0 3 Volts Pirani Type Gauges Gauges can always be zeroed Cold Cathode Gauges Gauges cannot be zeroed Hot Cathode Gauge...

Страница 135: ...the user defined zero of the sensor MFC on the selected channel Note 1 For the MKS Type 120 capacitance manometer the zero is bypassed both in the sensor and in the 146 unit 2 For Pirani gauges the fa...

Страница 136: ...o Span a Sensor with a Reference page 115 Actual Pressure or other measured parameter Spanning adjusts the slope of a gauge s Pressure versus Actual Pressure or other measured parameter line Original...

Страница 137: ...DISPLAY MODE key until the 146 unit is in Normal Mode The system responds by scrolling through modes 2 Press the SPAN key followed by 1 2 3 or 4 The system responds by spanning the sensor on the sele...

Страница 138: ...s s u r e R e a d i n g Reference Point New slope Original slope Actual Pressure or other measured parameter Figure 30 Spanning a Sensor with a Reference Note 1 Pirani gauges must be reading above 100...

Страница 139: ...m responds by scrolling through modes 2 Press SPAN followed by 5 DUAL followed by 1 2 3 or 4 lower range sensor followed by 1 2 3 or 4 again upper range sensor The system responds by spanning the sens...

Страница 140: ...page 190 to view whether the factory defined or user defined span is in effect 1 Repeatedly press the DISPLAY MODE key until the 146 unit is in Normal Mode The system responds by scrolling through mod...

Страница 141: ...hapter for instructions on how to enable the analog set point feature Analog set point is a voltage input that determines the analog set point Analog Set Point Torr I n p u t V o l t a g e 0 0 500 100...

Страница 142: ...ange However the feature must be enabled to allow the 146 unit to control with an analog set point refer to Code 15x How To Set Up Analog Set Point in the Operation in Setup Mode chapter 1 Repeatedly...

Страница 143: ...the upper point of the analog set point input range equal to the current analog input The lower point of the input range remains fixed The slope of the analog input voltage versus analog set point li...

Страница 144: ...zero flow 2 You must use the appropriate CB147 X cable listed in Table 20 page 64 to enable the MFC override commands The CB259 5 and CB259 10 cables do not support the open and close override comman...

Страница 145: ...ll continue to function during the degassing procedure 2 A hot cathode must be on channel on in order to degas it 1 Repeatedly press the DISPLAY MODE key until the 146 unit is in Normal Mode The syste...

Страница 146: ...de must be on channel on in order to degas it The front panel display for the degassing hot cathode displays dG the degas code continuously for a high power degas A hot cathode must be on channel on i...

Страница 147: ...lid until the display stops flashing within 1 to 2 seconds 1 Repeatedly press the DISPLAY MODE key until the 146 unit is in Normal Mode The system responds by scrolling through modes 2 Press the DEGAS...

Страница 148: ...he Leakage Rate as in this example or instantaneous Leakage Figure 33 Leakage Mode Figure 33 shows a sample window for Leakage Mode In Leakage Mode all upper displays show a pressure reading provided...

Страница 149: ...ode was first entered For example if the pressure reading on channel 4 was 900 Torr when Leakage mode was first entered the base pressure and the current pressure reading is 905 Torr the instantaneous...

Страница 150: ...en re instating the zero once a sensor has been zeroed Span a Pirani Sensor to Atmosphere Sets the upper pressure reading of a Pirani sensor equal to 760 Torr or Atmosphere Atm whichever is applicable...

Страница 151: ...reading from the gauge on channel 1 is shown here The pressure reading from the gauge on channel 2 is shown here The pressure reading from the gauge on channel 3 is shown here Software version number...

Страница 152: ...does not matter that channel 4 is used in both setups because only one setup can be used a time Note The Dual Channel feature only effects what is shown in the main display System control cannot be go...

Страница 153: ...ase pressure is obtained and stored for all active channels Note In this example the gauges on channels 1 and 4 make up the dual channel display Figure 35 Dual Channel Display in Leakage Mode In a dua...

Страница 154: ...meters which are in contact with a cryo pump during regeneration procedures The gauges may cause an explosion if they are not powered down Turning a capacitance manometer or mass flow controller MFC o...

Страница 155: ...by scrolling through modes 2 Press the ON LEAD or OFF GAIN key followed by A B C or D The system responds by enabling press ON LEAD or disabling press OFF GAIN the selected alarm Note Alarms A and B a...

Страница 156: ...ero pressure The zero is adjusted by varying the power until a standard output voltage is achieved Actual Pressure or other measured parameter 0 Zero should be lowered Zero should be raised Good Zero...

Страница 157: ...he zero function if the reading deviates from 0 0 by more than 10 of the full scale range of the MFC For example to zero a 10 sccm unit the reading must be 0 0 1 0 sccm 1 Repeatedly press the DISPLAY...

Страница 158: ...ot complete the zeroing itself a CAN T ZERO message is momentarily displayed and the 146 unit completes the zeroing provided the 120 gauge is within 0 8 V of zero 6 TC gauges must be zeroed when used...

Страница 159: ...citance Manometer 0 8 Volts to 0 8 Volts Linear Capacitance Manometer 0 3 Volts to 0 3 Volts Pirani Type Gauges Gauges can always be zeroed Cold Cathode Gauges Gauges cannot be zeroed Hot Cathode Gaug...

Страница 160: ...the user defined zero of the sensor MFC on the selected channel Note 1 For the MKS Type 120 capacitance manometer the zero is bypassed both in the sensor and in the 146 unit 2 For Pirani gauges the f...

Страница 161: ...eference refer to How To Span a Sensor with a Reference page 140 Actual Pressure or other measured parameter Spanning adjusts the slope of a gauge s Pressure versus Actual Pressure or other measured p...

Страница 162: ...DISPLAY MODE key until the 146 unit is in Leakage Mode The system responds by scrolling through modes 2 Press the SPAN key followed by 1 2 3 or 4 The system responds by spanning the sensor on the sel...

Страница 163: ...nning is done with two sensors that are well within their measurement ranges Note This procedure does not apply to capacitance manometers Spanning adjusts the slope of a gauge s Pressure versus Actual...

Страница 164: ...anometer The capacitance manometer must be at least a decade above its zero reading within one decade of the unspanned ion gauge and reading at or below 10 mTorr 1 Repeatedly press the DISPLAY MODE ke...

Страница 165: ...page 190 to view whether the factory defined or user defined span is in effect 1 Repeatedly press the DISPLAY MODE key until the 146 unit is in Leakage Mode The system responds by scrolling through mo...

Страница 166: ...ode chapter for instructions on how to enable the analog set point feature Analog set point is a voltage input that determines the analog set point Analog Set Point Torr I n p u t V o l t a g e 0 0 50...

Страница 167: ...ge range However the feature must be enabled to allow the 146 unit to control with an analog set point refer to Code 15x How To Set Up Analog Set Point in the Operation in Setup Mode chapter 1 Repeate...

Страница 168: ...ion in Setup Mode chapter 1 Repeatedly press the DISPLAY MODE key until the 146 unit is in Leakage mode The system responds by scrolling through modes 2 Provide an analog input equal to the desired fu...

Страница 169: ...cables will not damage either unit How To Command an MFC Close Override A mass flow controller MFC moves to full close from any position within two seconds when commanded with a close override 1 Repe...

Страница 170: ...s the DISPLAY MODE key until the 146 unit is in Leakage Mode The system responds by scrolling through modes 2 Press either the or key followed by OFF GAIN then 1 2 3 or 4 The system responds by removi...

Страница 171: ...e to function during the degassing procedure 2 A hot cathode must be on channel on in order to degas it 1 Repeatedly press the DISPLAY MODE key until the 146 unit is in Leakage Mode The system respond...

Страница 172: ...sing procedure 2 A hot cathode must be on channel on in order to degas it The front panel display for the degassing hot cathode displays dG the degas code continuously for a high power degas 1 Repeate...

Страница 173: ...lid until the display stops flashing within 1 to 2 seconds 1 Repeatedly press the DISPLAY MODE key until the 146 unit is in Leakage Mode The system responds by scrolling through modes 2 Press the DEGA...

Страница 174: ...ted in a recipe The default values in these recipes are GAIN 10 LEAD 1 5 seconds SET POINT 0 By changing these default values you can match the best lead and gain parameters with different set points...

Страница 175: ...The pressure reading from the gauge on the control channel in this case channel 2 is shown here Note The control channel determines which gauge s pressure reading is compared to set point Note This pa...

Страница 176: ...edit the LEAD parameter The GAIN value for the selected recipe is shown here You must select a recipe before you can edit the GAIN parameter MAIN DISPLAY This is the SET POINT value for the selected...

Страница 177: ...ter name is displayed when the parameter is editable For example the Base parameter is editable when the word BASE is displayed and the Set Point parameter is editable when the words SET POINT are dis...

Страница 178: ...cipe Start The START position for the selected recipe Integral The INTEGRAL value for the selected recipe Preset The PRESET position for the selected recipe Gain The LEAD value for the selected recipe...

Страница 179: ...enabled it can override the Start parameter Adjust the Integral parameter The Integral parameter selects the time constant used for the integral term of the PID control Adjust the Preset parameter The...

Страница 180: ...gend is currently displayed one press of the selects the Valve Position parameter The and keys the QUIET CANCEL key and the ENTER key function differently in the two levels of Tuning Mode On the upper...

Страница 181: ...rameters ENTER selects parameter for editing To select Valve Position 1 No other Tuning Mode parameters can be displayed 2 Control Mode parameter HOLD or MANUAL must be displayed QUIET CANCEL 1 Goes d...

Страница 182: ...ntrol moves to the 3 digit QUIET CANCEL 1 Returns a parameter to its pre edited value Lower Level only 2 Selects the Valve Position parameter Both Levels 3 Returns the 146 unit to Normal Mode and 1 Sc...

Страница 183: ...indicator segments The five upper segments represent pressure deviation over set point and the five lower segments represent pressure deviation under set point The 146 unit determines the segment s t...

Страница 184: ...bove and below set point Upper and lower deviation indicator segments light up to indicate over and under pressure readings In effect the deviation indicator provides similar information to that provi...

Страница 185: ...channel determines which gauge s pressure reading is compared with set point This parameter must be HOLD as in this example or MANUAL in order to adjust the valve position shown in the left display Fi...

Страница 186: ...ft display to blink 4 Enter a Valve Position expressed as a percent of the valve control signal output A new Valve Position may be entered using the number keys The Valve Position which is currently d...

Страница 187: ...the pressure reading from the gauge on the control channel Figure 46 Adjusting the Base Valve Position Base is a valve control parameter that is expressed as a percent of the valve control signal out...

Страница 188: ...ng the center display to blink 4 Enter the Base value The range is from 0 to 103 of full open and the default is 0 A If the center display shows the correct base value press the ENTER key B If the cen...

Страница 189: ...s recipe 2 MAIN DISPLAY This is the pressure reading from the gauge on the control channel Figure 47 Adjusting the Start Valve Position Start is a valve position expressed as a percent of the valve co...

Страница 190: ...onds by causing the center display to blink 4 Enter the Start value The range is from 0 to 103 of full open and the default is 0 A If the center display shows the correct Start value press the ENTER k...

Страница 191: ...iting in this case it is recipe 2 MAIN DISPLAY This is the pressure reading from the gauge on the control channel MANUAL TORR TUNING INTEGRAL Figure 48 Adjusting the Integral Value The Integral parame...

Страница 192: ...3 seconds A If the center display shows the correct Integral value press the ENTER key B If the center display is not correct use the numeral keys and arrow keys to enter the correct Integral value t...

Страница 193: ...pe 2 MAIN DISPLAY This is the pressure reading from the gauge on the control channel Figure 49 Adjusting the Preset Valve Position Preset is a valve position expressed as a percent of the valve contro...

Страница 194: ...A If the center display shows the correct Preset value press the ENTER key B If the center display is not correct use the numeral keys and arrow keys to enter the correct Preset value then press the E...

Страница 195: ...ith the AUTO feature refer to How To Set the Valve to AUTO position in the Operation in Control Mode chapter it controls according to the parameter values of the active recipe refer to How To Select t...

Страница 196: ...r Lead between 0 001 and 1000 seconds the default is 1 5 seconds A If the Lead value is already correct press the ENTER key B If the Lead value is incorrect use the ZERO EXP and numeral keys to enter...

Страница 197: ...the GAIN parameter MAIN DISPLAY This is the pressure reading from the gauge on the control channel Figure 50 Adjusting the Gain Value Gain is a control parameter When installed in a control loop the 1...

Страница 198: ...display and proceed to the next step 3 Press the OFF GAIN key OR scroll through the Tuning Mode parameters with the arrow keys until the GAIN legend is displayed then press the ENTER key The system re...

Страница 199: ...an edit the LEAD parameter The GAIN value for the selected recipe is shown here You must select a recipe before you can edit the GAIN parameter Figure 51 Adjusting the Lead Value The Lead parameter cr...

Страница 200: ...y and proceed to the next step 3 Press the ON LEAD key OR scroll through the Tuning Mode parameters with the arrow keys until the LEAD legend is displayed then press the ENTER key The system responds...

Страница 201: ...POINT value for the selected recipe In this example SET POINT is the parameter which is selected for editing You must select a recipe before you can edit the SET POINT parameter Figure 52 Adjusting th...

Страница 202: ...scroll through the Tuning Mode parameters with the arrow keys until the SET POINT legend is displayed then press the ENTER key The system responds by changing the window parameters and causing the le...

Страница 203: ...How To Adjust Set Point Chapter Six Operation in Tuning Mode 180 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 204: ...to read pressure over a range that is spanned by two gauges All the miscellaneous codes for the 146 instrument are contained within Setup Mode CLOSE TORR SETUP TRIP POINT CENTER DISPLAY RIGHT DISPLAY...

Страница 205: ...d Refer to Figure 1 page 21 to refresh your memory of exactly where the parameter names appear in the front panel window Individual miscellaneous codes are indicated by the code number in the left dis...

Страница 206: ...puts Analog Output Input channel Output scaling method Pressure Full scale output or set point Sensor Calibration Input channel number CM sensor resolution Type of gauge CM sensor range P factory or u...

Страница 207: ...Mode Code number Determine Leakage Mode main display 8 Edit Data Logger Interval Code number Data logger interval value 10x Adjust Display Lag Code number Display lag percent 11x Auto Zero Code number...

Страница 208: ...e pressure at which an alarm is tripped Alarms A and B are standard Alarms C and D are only available with the Auxiliary Output board Sensor Calibration Sensor calibration is used to customize paramet...

Страница 209: ...e main display in Leakage Mode Code 8 Data Logger Interval Edits the data logger interval Code 10x Adjust Display Lag Where x is a channel number Selects a display sensitivity to accommodate the level...

Страница 210: ...Pressure Shutoff Where x is a channel number Edits the high pressure shutoff value and the internal fast rate of rise shutoff value Code 17x Adjust MFC Set Point Mode and Co channel Where x is a chann...

Страница 211: ...ected alarm is ON enabled or OFF disabled as shown in this example Figure 54 Display for Setting Alarm Trip Points The trip point is the pressure at which an alarm is tripped Alarms A and B are standa...

Страница 212: ...he ENTER key The system responds by accepting the alarm status and causing the center display to blink 6 Enter the channel number to associate with the chosen alarm and select the relay untripped stat...

Страница 213: ...Parameters Type Adjustable Parameters Pirani or Convection Gauge Gas Type Gauge Calibration Parameters Zero factory or user defined Span factory or user defined Hot Cathode Gauge Sensitivity High Pre...

Страница 214: ...le In the right display there is a code for the input channel sensor type Refer to Figure 55 for a list of codes and sensor types Linear 107 Pirani Convection Cold Cathode Mass Flow Controller HPS CEP...

Страница 215: ...libration for Capacitance Manometers Refer to How To Perform Sensor Calibration MFC Setup page 190 for steps 1 through 3 Capacitance manometers may be listed as 107 120 or ln in the right display 4 En...

Страница 216: ...esolution range for a Type 120 gauge or linear capacitance manometer is 7 decades The default resolution for all capacitance manometers is 10 1 A If the display is correct then press the ENTER key B I...

Страница 217: ...e selected n2 nitrogen as in this case HE helium and Ar argon MAIN DISPLAY Figure 57 Calibration for Pirani and Convection Gauges The sensor type codes are P for Pirani Cn for Convectron and CP for HP...

Страница 218: ...by accepting the sensor type and blinking the right display 5 Use the arrow keys to select the gas type n2 for nitrogen HE for helium and Ar for argon The default gas type is nitrogen A If the displa...

Страница 219: ...cathode sensor is indicated by the code cc 4 Enter a combined gauge and gas correction factor GCF A If the display is correct press the ENTER key B If the display is incorrect enter another value then...

Страница 220: ...ature is enabled and the sensor pressure reading drops below the disconnect threshold value entered here an alarm sounds The factory configuration value for the sensor disconnect threshold is 1 0 to d...

Страница 221: ...e a high power hot cathode and it is the default setting The letter l is used to indicate a low power hot cathode HPS low power Bayard Alpert nude hot cathode Refer to Configuring the Hot Cathode Boar...

Страница 222: ...nect threshold is set to 1 0 Note When this feature is enabled and the sensor pressure reading drops below the disconnect threshold value entered here an alarm sounds The factory configuration value f...

Страница 223: ...y The three modes of operation for an MFC are Set Point Totaling and Ratio The different modes are indicated by codes in the center display SP for the Set Point mode to for the Totaling mode and rA fo...

Страница 224: ...4 Enter the range of the MFC in sccm The default is 1000 sccm The range is 0 0002 sccm to 1 x 10 5 sccm A If the display is correct press the ENTER key B If the display is incorrect enter the correct...

Страница 225: ...or Thermocouples The thermocouple gauge codes are 1A for the MKS TC 1A and d6 for the Hastings DV 6M gauge The gauge type is automatically determined when a channel is initialized Note The thermocoupl...

Страница 226: ...gon listed in the main display The default gas type is nitrogen A If the display is correct then press the ENTER key B If the display is incorrect scroll to the correct gas type then press the ENTER k...

Страница 227: ...els in the Main Display in either the Operation in Normal Mode or Leakage Mode chapters The dual channel function allows the 146 unit to display pressure readings from one of two associated sensors On...

Страница 228: ...l Channel Sensor min resolution for CM Lo Dual Channel Sensor max range for CM Cold Cathode Hot Cathode 0 1 Torr CM 1 Torr CM 10 Torr CM 100 Torr CM HPS Pirani 9 mT 1 mT X 100 mT 10 mT 1 T 100 mT 10 T...

Страница 229: ...r high switchpoint setting 1 Repeatedly press the DISPLAY MODE key until the 146 unit is in Setup Mode The system responds by scrolling through modes 2 Use the arrow keys to scroll to the DUAL CHANNEL...

Страница 230: ...selections of dual channel operation The system responds by accepting the type of dual channel operation and causing the center display to blink 7 Enter the channel number associated with the control...

Страница 231: ...either Ln or lo0 through lo9 logarithmic is selected as the output scaling method the main display is used to enter the pressure value corresponding to the full scale output Note The 146 unit default...

Страница 232: ...utput Each logarithmic decade is equal to 1 Volt As an example you want the full scale voltage of 10 Volts to correspond to 20 Torr and you want three decades of logarithmic output To accomplish this...

Страница 233: ...ght display is correct press the ENTER key B If the right display is not correct use the arrow keys to select the output scaling method then press the ENTER key If ln or lo1 lo9 is selected the system...

Страница 234: ...dited The procedures for parameter selection or editing are listed in Table 51 How To Adjust Miscellaneous Codes To select a parameter choice Use the and keys to scroll through the choices in a parame...

Страница 235: ...Modes The other three displays in Normal and Leakage Modes continue to show pressure readings The selections made in this function only effect the channel shown in the main display in Normal or Leakag...

Страница 236: ...he emission current is maintained at 1 milliampere when the pressure is below 1 x 10 4 Torr At pressures higher than 1 x 10 4 Torr the emission current is maintained at 100 microamperes This reduced e...

Страница 237: ...n an ion gauge is selected as the main display channel in Normal or Leakage Modes Press the ENTER key A If the display is correct for an ion gauge press the ENTER key B If the display is not correct f...

Страница 238: ...key until the 146 unit is in Setup Mode The system responds by scrolling through modes 2 Use the arrow keys to scroll to the CODE legend The system responds by causing the left display to blink 3 Ente...

Страница 239: ...m function turns On Off some of the beeper sounds made by the 146 unit If turned Off the only remaining sound from the beeper is the key press click Note The Audio Alarm function should be set to Off...

Страница 240: ...ain display to blink 4 Select On or Off in the main display the default is On A If the display is correct press the ENTER key B If the display is not correct press either the ON LEAD to turn sounds On...

Страница 241: ...erent problem in PID control algorithm calculations The noise itself is inherent in control systems With a low Alpha value the lead s response time is slower With a higher Alpha value the lead may be...

Страница 242: ...or code 4 and causing the main display to blink 4 Enter an appropriate Alpha value between 5 and 99 the default is 20 A If the display is correct press the ENTER key B If the display is not correct en...

Страница 243: ...ocol is selected MAIN DISPLAY The baud rate is selected in this display In this example the baud rate is 9600 Figure 70 Code 5 Display This function is used to set up the RS 232 port The features that...

Страница 244: ...ol A If the display is correct press the ENTER key B If the display is not correct use the arrow keys to select the correct protocol then press the ENTER key The choices for protocol are 146 MKS Proto...

Страница 245: ...akage rate calculations If a 0 is entered here as in this example the main display in Leakage Mode will show instantaneous leakage Instantaneous leakage is the difference between the current pressure...

Страница 246: ...ng the appropriate parameters for code 7 and causing the main display to blink 4 Enter the leakage rate time base OR 0 for instantaneous leakage The default value of 0 configures the 146 unit for inst...

Страница 247: ...output of pressure readings The default is 60 seconds The pressure reading outputs are for all four channels and are sent via the RS 232 port The data logger interval may be selected at any time rega...

Страница 248: ...main display to blink 4 Enter the value for the data logger interval 1 through 3600 seconds inclusive A If the display is correct press the ENTER key B If the display is not correct use the numeral ke...

Страница 249: ...When sensitivity is increased any noise on the selected channel becomes more apparent in the display Therefore for noisy applications a low sensitivity value is best Sensitivity is entered as a percen...

Страница 250: ...ty percent the default is 100 for all sensors and 25 for an MFC A If the display is correct press the ENTER key B If the display is not correct enter the correct sensitivity percent 1 through 100 and...

Страница 251: ...set up and enabled one channel defined as the reference channel automatically zeros a second channel defined as the selected channel The selected channel is continually zeroed as long as the referenc...

Страница 252: ...nnel number the default is channel 1 A If the display is correct press the ENTER key B If the display is not correct enter the correct reference channel number 1 through 4 and press the ENTER key The...

Страница 253: ...ed in this example MAIN DISPLAY This is the shutoff pressure for the auto power control Figure 75 Code 12x Display This function applies to ion gauges only The x in the code number represents the chan...

Страница 254: ...ausing the right display to blink 5 Select on or off in the right display the default is off When this function is enabled on a channel can still be turned off manually If turned off manually a channe...

Страница 255: ...ature either enabled or disabled applies to all recipes MAIN DISPLAY The softstart speed value is edited here The value entered here only effects the selected recipe Figure 76 Code 13x Display This fu...

Страница 256: ...efault is 10 seconds A If the display is correct press the ENTER key B If the display is not correct enter the correct softstart speed value 1 to 99 then press the ENTER key The system responds by acc...

Страница 257: ...isplay The input channel number for the control loop of the selected recipe is entered here In this example input channel 1 provides the input in recipe 2 Figure 77 Code 14x Display This function requ...

Страница 258: ...to all recipes A If the display is correct press the ENTER key B If the display is not correct use the arrow keys to select the correct polarity direction then press the ENTER key The system responds...

Страница 259: ...point input Figure 78 Code 15x Display This function requires the Control board The x in the code number represents a recipe number Each recipe can be configured with a different full scale set point...

Страница 260: ...in Normal and Leakage Modes however to do so the current analog input voltage must be altered To change the upper point not the lower point independent of the current analog input use Code 15x 1 Repea...

Страница 261: ...e voltage to set the upper limit of the analog input voltage range the default is 5 Volts A If the display is correct press the ENTER key B If the display is not correct enter the correct full scale v...

Страница 262: ...channel number for the hot cathode The user defined high pressure shutoff value is used to protect a hot cathode from potential damage if the pressure rises too high When the gauge is turned off with...

Страница 263: ...factory configuration has this feature disabled To enable the feature press the ON LEAD key Note Only enable the internal fast rate of rise shutoff feature if your pressure signal is stable A noisy p...

Страница 264: ...ration either set point SP totaling to or ratio rA MAIN DISPLAY This is the MFC set point for use in either the set point or totaling modes of operation For the ratio mode this entry is the ratio para...

Страница 265: ...y The 146 uses a pressure control signal PCS or a total flow signal as feedback The Ratio mode uses a logical control channel to execute the PID control algorithm and achieve the desired gas ratio The...

Страница 266: ...5 Volts 75 of 5 Volts Pressure Measuring Control When using a pressure measuring control channel up to three MFCs can be configured to function in a pressure control loop In this case the total flow o...

Страница 267: ...oint to for Totaling and rA for Ratio A If the display is correct press the ENTER key B If the display is not correct press an arrow key and then press the ENTER key If Set Point SP is selected no mor...

Страница 268: ...When the 146 instrument detects the type of gauge attached to each channel it can distinguish between a Pirani and convection gauge However it cannot distinguish between the two convection gauges the...

Страница 269: ...mber and press the ENTER key The system responds by displaying the abbreviation for the type of convection gauge installed and blinking the main display entry 4 Use the arrow keys to toggle between th...

Страница 270: ...ipes Control Mode is Used when Performing the Following Procedures Control Mode Functions Select an Active Recipe The active recipe is used to control the valve when the AUTO feature is selected Valve...

Страница 271: ...OR if an analog set point is being used the analog set point value is displayed here LEFT DISPLAY CENTER DISPLAY RIGHT DISPLAY The current pressure reading from the control channel is displayed here M...

Страница 272: ...gments on the front panel refer to Figure 12 page 43 Five segments represent pressure over set point and five represent pressure under set point The 146 unit determines the segment s to illuminate acc...

Страница 273: ...Open Auto Close Hold and Manual and the Active Recipe parameter can be selected through the front panel keyboard The Open Close Manual and Active Recipe parameters can also be selected through the bot...

Страница 274: ...esponds by making the selected recipe the active recipe The selected recipe number appears next to the letter A for Active in the center display How To Set the Valve to OPEN Position This command sequ...

Страница 275: ...ponds by operating the valve according to the control parameters of the active recipe How To Set the Valve to CLOSE Position This command sequence adjusts the valve control signal output to 0 Generall...

Страница 276: ...this feature is evoked the valve control signal output immediately changes to the value selected in the How To Adjust Preset in the Operation in Tuning Mode chapter This has the effect of altering the...

Страница 277: ...o Set the Valve to MANUAL Position Chapter Eight Operation in Control Mode 254 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisant...

Страница 278: ...00 2400 4800 Parity Even Odd No Number of Data Bits 7 8 Number of Stop Bits 1 Cannot be changed End of Line Delimiter CR Cannot be changed Protocol MKS Data Logger Table 53 RS 232 Communication Parame...

Страница 279: ...channel numbering sequence depends on the position of the plug in board in the 146 unit The input and output channels are numbered separately The 146 unit assigns the channel numbers upon power up Fo...

Страница 280: ...t may be one of the following Channel Number 1 through 4 5 for dual channel 1 or 6 for dual channel 2 Alarm A through D Recipe Number 1 through 4 Data This can be variable length ASCII data up to 20 b...

Страница 281: ...The number of data bits must be set to 8 when the checksum is enabled The 146 unit is initially configured with the checksum disabled Refer to Miscellaneous Messages page 273 to enable the checksum U...

Страница 282: ...are grouped by function Refer to Appendix G Board Specific Commands page 315 for a list of commands organized by plug in board type Should an incorrect command message be sent the 146 unit will retur...

Страница 283: ...Power Shutoff Pressure 0 8 4 1 2 3 or 4 channel ASCII value 1 to 1 Torr CR c1 c2 Hot Cathode Degas 0 8 5 1 2 3 or 4 channel L Lo power H Hi power O Off CR c1 c2 Table 55 Power Control Messages Table 5...

Страница 284: ...c2 Span Channel 0 5 3 1 2 3 or 4 channel or S set point CR c1 c2 Define Upper Analog Set Point Input 0 5 4 Any character Max Voltage in ASCII CR c1 c2 Span Channel with reference 0 5 5 1 2 3 or 4 cha...

Страница 285: ...r Operation in Normal Mode Define Upper Analog Set Point Input Chapter Five Operation in Leakage Mode Span Channel with reference Chapter Four Operation in Normal Mode Zero On Off Chapter Four Operati...

Страница 286: ...he resolution as a power of 10 CR c1 c2 Channel Gas Type 0 6 3 1 2 3 or 4 channel N Nitrogen A Argon H Helium CR c1 c2 Channel Gauge Factor Sensitivity 0 6 4 1 2 3 or 4 channel ASCII value CR c1 c2 Io...

Страница 287: ...ation Parameters for Each Gauge Type Chapter References for Sensor Configuration Messages Function Chapter Channel Range Chapter Seven Operation in Setup Mode Channel Resolution Chapter Seven Operatio...

Страница 288: ...annel 1 0 3 1 2 3 or 4 channel 1 2 3 or 4 co channel CR c1 c2 Open Close Cancel Override 1 0 4 1 2 3 or 4 channel O Open C Close N Cancel CR c1 c2 Table 62 Mass Flow Controller Messages Table 63 lists...

Страница 289: ...1 c2 Dual Channel Threshold LO 0 9 3 1 or 2 dual chan 0 to 25 000 inclusive CR c1 c2 Dual Channel Mode 0 9 4 1 or 2 dual chan OFF off CNT continuous DSC Discontinuous CR c1 c2 Table 64 Dual Channel Se...

Страница 290: ...Alert 0 1 5 Any character E Enable D Disable CR c1 c2 Untripped State of Unlatched Relay 0 1 6 A B C or D A Actuated D Deactuated CR c1 c2 Table 66 Alarm Messages Table 67 lists the chapter that expl...

Страница 291: ...ssure is within the defined operating range the alarm will resume its untripped state If the pressure is outside of the defined operating range the alarm will resume its tripped state The state of the...

Страница 292: ...r 3 analog output channel 1 2 3 4 5 dual 1 or 6 dual 2 CR c1 c2 Full Scale Pressure for 10 V output 0 7 3 1 2 or 3 analog output Value in ASCII CR c1 c2 Table 68 Analog Output Messages Table 69 lists...

Страница 293: ...Data Optional checksum Select Control Mode 0 2 1 0 1 A Auto O Open C Close H Hold M Manual CR c1 c2 Select Active Recipe 0 2 2 0 1 1 2 3 or 4 recipe CR c1 c2 Select Controller Polarity 0 2 3 0 1 D Dir...

Страница 294: ...channel 0 is a virtual control channel used in conjunction with Mass Flow Controllers Table 72 Control Adjust Messages Table 73 lists the chapter that explains the function performed by each message...

Страница 295: ...t Control Channel 0 4 7 1 2 3 or 4 recipe 1 2 3 or 4 channel CR c1 c2 Table 74 Recipe Specific Messages Table 75 lists the chapter that explains the function performed by each message Chapter Referenc...

Страница 296: ...ck L Lock CR c1 c2 Select Pressure Units 5 0 3 T Torr P Pascal B mBar CR c1 c2 Enable Checksum 5 0 5 E Enable D Disable CR Save to EEPROM 5 0 6 CR Leak Rate Period 5 0 7 ASCII value CR c1 c2 Select Fo...

Страница 297: ...the carriage return CR The checksum itself is not calculated into the checksum value When the checksum is enabled the 146 unit expects to receive a checksum for all incoming messages In return it sen...

Страница 298: ...cept messages in either format regardless of the format selected for its response messages To configure the 146 unit to respond in scientific notation issue the command 508 E CR where represents a bla...

Страница 299: ...h Time Stamp 6 0 2 channel 1 2 3 4 5 dual 1 or 6 dual 2 CR c1 c2 Channel Voltage 6 0 3 channel 1 2 3 4 5 dual 1 or 6 dual 2 CR c1 c2 Ion Current 6 0 4 channel 1 2 3 4 5 dual 1 or 6 dual 2 CR c1 c2 Emi...

Страница 300: ...Only Data Messages Response Format for Read Only Data Messages Message Response Description Channel Condition 608X status pres where x is 1 through 6 pres is an empty field unless status is A or B the...

Страница 301: ...t digital set point sp is An ASCII string All response messages terminate in a CR as the end of line delimiter Table 79 Response Format for Read Only Data Messages Chapter References for Read Only Dat...

Страница 302: ...el s reading with the time difference between readings A 16 bit counter tracks the elapsed time in 10 millisecond increments The counter increments by one count every 10 milliseconds until it reaches...

Страница 303: ...e selected a time base of 30 seconds the leak rate will be reported as Torr per 30 seconds The leak rate period entry is global and applies to all channels The leak rate is calculated as a moving aver...

Страница 304: ...ery the pressure reading To check the channel pressure enter 608C CR where C is the channel number 1 2 3 4 5 dual 1 or 6 dual 2 The 146 instrument responds with 608C status reading CR where status is...

Страница 305: ...ry calibration 1 02 Bad user configuration 2 04 Bad zero calibration 3 08 New configuration 4 10 Bad ROM Read Only memory 5 20 Bad RAM Random Access memory 6 40 Reserved 7 80 Reserved Table 81 Respons...

Страница 306: ...atus Messages Message Response Description Software Version version CR where version represents the software version number Channel Status C1 text LF CR C2 text LF CR C3 text LF CR C4 text LF CR where...

Страница 307: ...Cap Man CNCN Convection dual channel PRCN Pirani Convection C Cap Man board no sensor CN Convection single channel CNPR Convection Pirani CNTL Control board AUXO Auxiliary Output board Empty slot PR...

Страница 308: ...xt LF CR LTA text LF CR LTB text LF CR LTC text LF CR LTD text LF CR FPL text LF CR OM text LF CR MM text LF CR CM text LF CR SPB text LF CR SPC text LF CR SPD text LF CR where text is L for low Groun...

Страница 309: ...us Chapter Three Overview Configuration Setup Chapter Three Overview Rear Panel Status Chapter Three Overview Calibration Data Chapter Seven Operation in Setup Mode Table 84 Chapter References for Rea...

Страница 310: ...nel that is turned off Zero an ion gauge Ion gauges cannot be zeroed Read a channel that is out of range Read a hot cathode gauge that is performing a high power degas Perform a degas procedure on a c...

Страница 311: ...Error Messages Chapter Nine RS 232 Communications 288 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 312: ...ables and inspect the enclosure for visible signs of damage The 146 unit s environment should be kept dust free If a substantial change is made to the gas system verify that the maximum potential diff...

Страница 313: ...roper fuse selection Voltage Range and Fuse Selection Setting Nominal Voltage Range Fuses 250V IEC 115 VAC 100 to 120 VAC 1 6A T 230 VAC 220 to 240 VAC 1 0A T Table 86 Voltage Range and Fuse Selection...

Страница 314: ...stics Screen Display Performing 146 Instrument Self Tests All tests except Codes 5x 6x and 7x are initiated by entering a code number and pressing the ENTER key The 146 unit responds by performing the...

Страница 315: ...neral message code is displayed General message code Err is displayed for an inappropriate key sequence When this message is displayed press the QUIET CANCEL key to return to the initial diagnostics s...

Страница 316: ...f the tests fails at power up an error code is displayed E2 for PROM failure and E3 for RAM failure Code 3 Display Test 1 Press the 3 3 key and then the ENTER key The system should respond by providin...

Страница 317: ...turning to the initial diagnostics screen display Diagnostics Code 4 Key Test Results Key Pressed What Appears in the Main Display the number keys 1 1 through 0 D The corresponding number For example...

Страница 318: ...gure 88 The Keypad Test Result for the QUIET CANCEL Key Code 5 Beeper Test 1 Press the 5 DUAL key and then the ENTER key The system should respond by sounding one beep and placing the number 5 in the...

Страница 319: ...he center display shows 5A 2 Press the ON LEAD key The system should respond by turning the selected relay on and displaying the word on When turned on a normally open contact is closed energized A no...

Страница 320: ...hexadecimal values is shown in the main display For example if Remote Zero 1 and Latch A are low they are assigned a value of 0 The other inputs are assigned the hexadecimal values shown The 146 unit...

Страница 321: ...through 3 in the center display and the analog output abbreviation AnAl in the main display The analog output is normally proportional to pressure The 146 unit sends a square wave to make the output g...

Страница 322: ...are reset The hardware reset causes relays C and D to go to default positions During normal operation of the 146 unit the processor prevents the timed hardware reset from executing by sending out an i...

Страница 323: ...e done with this code because the 146 unit is not attached to the appropriate calibration instrumentation The 146 unit must be powered off to exit Code 9999 Caution 1 If the code 9999 is shown in the...

Страница 324: ...on Cold Cathode Gauge Tubes Convection Gauge Tubes HPS Division Convection Enhanced Pirani Granville Phillips Convectron Hot Cathode Gauge Tubes1 HPS Division Hot Cathode Gauge Tubes including thoriat...

Страница 325: ...uirements Installation Category Pollution Degree Product Safety and Liability EMC Directive 89 336 EEC Low Voltage Directive 73 23 EEC II according to EN 61010 1 2 according to IEC 664 Product Safety...

Страница 326: ...ction HPS Convection Enhanced Pirani CEP Granville Phillips Convectron Adapter cable for G P Convectron cable CB146 37 CB146 14 CB146 1 Hot Cathode HPS low power nude Bayard Alpert B A KF40 or 2 CF MK...

Страница 327: ...ol Valves Cable Type 148 248 Type 153 not powered by the 146 unit Type 153 not powered by the 146 unit Type 154 CB251 2 10 CB153 4 10 CB153 13 10 CB251 2 10 with CB248 1 5 adapter Power Supply Readout...

Страница 328: ...rst four bytes of the command E112 Inappropriate Command The 146 instrument will return an inappropriate command error message if the command cannot be executed on the selected channel or at this time...

Страница 329: ...n contain a maximum of 26 characters If your data field exceeds 26 characters the 146 instrument will return an invalid command error message Other possible causes of an invalid command error message...

Страница 330: ...r segments of display are turned on Underrange conditions depend upon which sensor is associated with the channel A differential capacitance manometer goes underrange when the reference port pressure...

Страница 331: ...t E12 System recovery failure C5 Cannot turn off channel with associated alarms enabled C6 Cannot turn off channel with associated control channel in AUTO C7 Cannot shut off reference channel of an au...

Страница 332: ...range 105 000 Torr Disabled Off Alarms Audio On Alpha 20 Analog Output End Point Value Type Channel association 1000 Torr Linear 1 Analog Set Point Zero voltage Full scale voltage Setting Status Over...

Страница 333: ...lue Lower threshold value Off 1 1 0 range 0 and 25 000 inclusive 0 range 0 and 25 000 inclusive Gain 10 range 0 001 to 10 000 Hot Cathode Disconnect Threshold Internal High Pressure Fast Shutoff Sensi...

Страница 334: ...03 of full open Protocol MKS Protocol Set Point 0 range 100 000 Torr Softstart Speed value Status 10 range 1 0 to 990 seconds Disabled SPAN for all recipes 1 Start 0 range 0 to 103 of full open Unit T...

Страница 335: ...Default Values Appendix E Instrument Default Values 312 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 336: ...rr 1 05 x 10 5 Torr Argon 1108 8 Torr 1 05 x 10 5 Torr Convectron Nitrogen 1060 5 Torr 1 05 x 10 5 Torr Helium 57 75 Torr 1 05 x 10 5 Torr Argon 1108 8 Torr 1 05 x 10 5 Torr HPS CEP Nitrogen Helium Ar...

Страница 337: ...errange and Overrange Values Appendix F Underrange and Overrange Values 314 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg c...

Страница 338: ...ter Pirani Convection Cold Cathode Hot Cathode Mass Flow Controller Thermocouple Auxiliary Output Control The commands are arranged in four groups power configuration calibration and status Refer to t...

Страница 339: ...Type 120 Sensor resolution 062 para res para is the channel number 1 2 3 or 4 res is an ASCII value that represents the resolution as a power of 10 from 7 to 7 Sensor type must be linear or Type 120 C...

Страница 340: ...y Sensor must be installed Report reading with time stamp 602 para para is the channel number 1 2 3 or 4 Request only Sensor must be installed Report sensor voltage 603 para para is the channel number...

Страница 341: ...ection Messages Function Description Command Range and Restrictions Power Channel power 081 para state para is the channel number 1 2 3 or 4 state is ON for on OFF for off Sensor must be installed Con...

Страница 342: ...alled Span function 057 para state para is the channel number 1 2 3 or 4 state is ON for on OFF for off Span 053 para para is the channel number 1 2 3 or 4 Command only Span function must be enabled S...

Страница 343: ...084 para pres para is the channel number 1 2 3 or 4 pres is the shutoff pressure in ASCII Configuration Gauge factor 064 para fact para is the channel number 1 2 3 or 4 fact is a numeric ASCII string...

Страница 344: ...ara para is the channel number 1 2 3 or 4 Request only Sensor must be installed Report channel reading 601 para para is the channel number 1 2 3 or 4 Request only Sensor must be installed Report senso...

Страница 345: ...ara pres para is the channel number 1 2 3 or 4 pres is the shutoff pressure in ASCII Degas 085 para dgas para is the channel number 1 2 3 or 4 dgas is H for high power degas L for low power degas O fo...

Страница 346: ...function must be on Status Report channel condition 608 para para is the channel number 1 2 3 or 4 Request only Sensor must be installed Report reading with time stamp 602 para para is the channel num...

Страница 347: ...hannel number 1 2 3 or 4 mode is R for Ratio S for Set Point T for Totaling Set Point value 102 para value para is the channel number 1 2 3 or 4 value is from 105 MFC F S range Totaling co channel 103...

Страница 348: ...MFC must be installed Report MFC flow rate 601 para para is the channel number 1 2 3 or 4 Request only MFC must be installed Report MFC flow rate with time stamp 602 para para is the channel number 1...

Страница 349: ...derrange Zero function must be on Auto zero function 058 para state para is the channel number 1 2 3 or 4 state is E for enabled D for disabled Auto zero reference sensor 059 para ref para is the chan...

Страница 350: ...pressure from 100000 to 100000 Torr inclusive Alarm association 013 para chan para is any character no significance chan is the input channel 1 2 3 or 4 Unlatch cur rently alarmed relays 014 para para...

Страница 351: ...nalog output 1 2 or 3 type is LN for linear LO1 to LO9 for log 1 to log 9 SP for set point Input Channel Selection 072 para chan para is the analog output 1 2 or 3 chan is the input channel 1 2 3 4 5...

Страница 352: ...ive recipe 022 para data para is control channel number 0 1 data is the recipe number 1 2 3 or 4 Controller Polarity 023 para data para is control channel number 0 1 data is D for direct R for reverse...

Страница 353: ...conds Set point F S 038 para data para is control channel number 0 1 data is from 0 to 10 Volts Recipe Specific Set point value 041 para pres para is the recipe number 1 2 3 or 4 pres is from 100 000...

Страница 354: ...er 24 cold cathode 24 54 106 320 control 329 control board 24 33 35 38 47 69 79 convection 24 50 245 318 general I O 33 65 87 297 hot cathode 24 55 322 ion gauge 81 mass flow controller 24 324 MFC 63...

Страница 355: ...27 129 185 204 206 235 Dual Pirani board 50 53 single channel 51 60 E Errors 287 305 F failsafe 68 front panel 17 20 39 43 152 289 function 21 fuses 33 290 G GAIN 40 42 45 81 95 151 155 156 157 159 16...

Страница 356: ...313 P parameter 21 154 258 parameter data 95 PCS 69 93 242 pirani gauge 30 318 Pollution Degree 29 PRESET 45 95 151 155 156 157 170 171 247 pressure control 69 90 92 pump choking 90 92 R recipes 17 8...

Страница 357: ...ements 90 system requirements 30 pressure transducer selection 30 valve selection 30 T temperature 29 thermocouple 59 202 326 TRIP POINT 46 86 87 88 95 184 185 188 189 troubleshooting 291 diagnostics...

Страница 358: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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