12
SB300 FOSB FOR 300 MM WAFERS
User Manual | Entegris, Inc.
GENERAL USE INSTRUCTIONS
—
MANUAL ASSEMBLY
Proper manual assembly of the SB300 FOSB
door is accomplished by aligning the door’s right
or left vertical edge to the shipper box opening
(Figure 19).
1. Grip the door and shipper box along the vertical
edge (pivot edge) with one hand and rotate the
door until the wafer cushion contacts the wafers.
2. Latch the lock on the pivot edge first by rotating
the cam counterclockwise 90° using the tabs
available, manual latch keys, or optional D-rings.
Apply inward pressure to the opposite side of the
door until it is flush to the shipper box opening
and latch closed using the same procedure.
It is possible to assemble the SB300 FOSB when
seated on a horizontal kinematic coupling plate.
However to aid in assembly, Entegris recommends
that the shipper box be placed on an angled surface
of 15°–75° degrees as shown in Figure 20.
Both the bottom kinematic coupling surface and
back surfaces of the shipper box should be sup-
ported when on the angled work surface. Selection
of the most suitable angle to be used is dependent
on the height of the assembly workstation.
Errors are greatly minimized using this assembly
method. However, it is also required that a visual
inspection be performed after each assembly to make
sure the wafers are properly engaged with the door
cushion. This is most easily done when viewing the
wafers and cushion through the center of the door.
NOTE: Door assembly should never be attempted with
the shipper box on its back and the wafers in a completely
vertical position. This can cause cross slotting and wafer
breakage (Figure 21).
D-RING HANDLES
D-ring handles are used for manually disengaging the
door latches and for door retention. The D-ring
handles also incorporate automated key slots for
automated operation. The D-rings are simply lifted
and then rotated 90° clockwise to unlatch the door.
In this position, the D-rings provide a secure handle
for removing and replacing the door. When the door
is replaced in position, rotating the D-ring keys 90°
counterclockwise engages the door latches.
Recommendations
Make sure the door is properly seated before
engaging the latches.
Figure 19
Figure 20
15°–75°
Support to
prevent
tipping
Figure 21
