SB300 FOSB FOR 300 MM WAFERS
9
User Manual | Entegris, Inc.
EQUIPMENT INTERFACE
—
The SB300 FOSB provides interoperability across
a variety of equipment. This section provides an
overview of one of the most common interfaces –
a load port – and then discusses the door interface
features and interfacing recommendations.
LOAD PORT INTERFACE
A load port is a piece of equipment commonly used
to provide an interface between a FOSB and a piece
of process equipment.
Basic Features
Most load ports incorporate many of the same basic
features (Figure 12). These features, defined in SEMI
standard E15.1, include:
• Door registration pins
• Kinematic coupling pins
• Port door
• Latch keys
• Primary hold down
Standard Operation
Operation of individual load port models will vary.
Basic load port operation includes:
• The FOSB is placed on the load port and located
by the kinematic coupling pins
• The load port advances the FOSB to the port door,
engaging the primary hold down to retain the FOSB
on the load port
• The door registration pins locate the FOSB door
• The latch keys turn 90° to unlatch the FOSB door
• The port door and FOSB door are removed, leaving
the wafers accessible to the process tool
This basic procedure is reversed after the process tool
replaces the wafers in the FOSB.
Door
registration
pins
Port door
Latch keys
Primary
hold down
Kinematic
coupling
pins
Figure 12. Load port basic features
