SB300 FOSB FOR 300 MM WAFERS
11
User Manual | Entegris, Inc.
Recommendations
The primary hold down is for use in applications
where the FOSB advances forward to engage the
feature. The secondary hold down can be used in
load port as well as AMHS applications. Use of the
hold down features is recommended to ensure the
FOSB cannot be removed from process equipment
prior to process cycle completion, and to prevent the
FOSB from falling or being knocked off of transport
equipment.
Related Specifications and Documents
• SEMI E47.1
Sensor Pads
Sensor pads are used to verify FOSB presence and
proper placement.
Recommendations
For accurate operation, use only the recommended
sensor pads.
Related Specifications and Documents
• SEMI E1.9, E47.1
FEOL and BEOL Pads
FEOL (front end of line) and BEOL (back end of line)
pads are used to prevent FEOL pods from being
processed on BEOL load ports and vice versa, which
prevents wafer cross contamination.
Recommendations
Rather than a presence pin to provide a physical
obstruction in the FEOL or BEOL positions, use
of a pin on equipment is recommended.
Related Specifications and Documents
SEMI E1.9, E47.1, E15.1
Figure 17. Sensor pads
Figure 18. FEOL and BEOL pads
