entegris SB300 FOSB, Руководство пользователя

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SB300 FOSB FOR 300 MM WAFERS
User Manual | Entegris, Inc.
SHELL
Number Component Material Qty
1 Shell housing Polycarbonate (PC) 1
2 Rear retainer Polybutylene
terephthalate (PBT) 1
3 KC plate Polycarbonate (PC) 1
4 Filter housing Polycarbonate (PC) 1
5 O-ring Viton
®
1
6 Filter media Electrostatic media 1
7 Auto flange Polycarbonate (PC) 1
8 Info pads
(optional) Black polycarbonate
(PC) 4
SECONDARY PACKAGING
—
STANDARD TWO-PACK
The SB300 FOSB standard package for delivery from
our factory to the customer with unattached accesso-
ries is shown in Figure 3. All parts are single bagged.
Outer Box
Entegris part number FLA-054-01
Dimensions: 680 mm L × 415 mm W × 365 mm H
(26.77" L × 16.34" W × 14.37" H)
Corrugated pad
Entegris part number FLA-052-03
Dimensions: 393.7 mm L × 337.82 mm W
(15.5" L × 13.3" W)
This package was designed to fit a standard pallet
size of 1100 mm × 1100 mm without overhang.
Pallet layers contain eight units, maximizing
utilization of pallet space.
NOTE: This secondary packaging is not designed
to ship the SB300 FOSB with wafers.
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4
1
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7
8
Figure 2
Figure 3