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ADVANCED MATERIALS HANDLING

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MANUAL

SB300 FOSB for

300 mm Wafers

User manual

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Содержание SB300 FOSB

Страница 1: ...ADVANCED MATERIALS HANDLING MANUAL SB300 FOSB for 300 mm Wafers User manual ...

Страница 2: ...4 Assembly Instructions 5 SB300 Options 5 Datum Orientation 6 Horizontal Datum 6 Facial Datum 6 Bilateral Datum 6 X Y and Z Dimensions 6 Structure 6 SEMI Standards 7 SEMI E62 7 SEMI M31 0999 7 SEMI E106 8 SEMI E47 1 8 SEMI E57 8 Specifications 8 Equipment Interface 9 Load Port Interface 9 Door Interface Points 10 Bottom Interface Points 10 General Use Instructions 12 Manual Assembly 12 D ring Hand...

Страница 3: ...ation Allows maximum 300 mm loadport interoperability Ensures accurate equipment interaction SECURE WAFER PROTECTION Automated operation minimizes potential contamination from human interaction Wafer plane accuracy Ultrapure low outgassing materials provide superior protection for wafer shipment Protects wafers during 1 5 m drop tests All plastic assembly prevents metallic contamination and corros...

Страница 4: ...tity 1 Wafer cushion Polycarbonate PC 1 2 Gasket Thermoplastic elastomer 1 3 Corner guides Catalogue POM 4 4 Door housing Polycarbonate PC 1 5 Lift arms PTFE filled polycarbonate white 4 6 Latch arms Acetal POM 4 7 Latch cams PTFE filled polycarbonate white 2 8 Latch cover Polycarbonate PC 2 2 1 3 4 5 6 7 8 Figure 1 ...

Страница 5: ...FOSB standard package for delivery from our factory to the customer with unattached accesso ries is shown in Figure 3 All parts are single bagged Outer Box Entegris part number FLA 054 01 Dimensions 680 mm L 415 mm W 365 mm H 26 77 L 16 34 W 14 37 H Corrugated pad Entegris part number FLA 052 03 Dimensions 393 7 mm L 337 82 mm W 15 5 L 13 3 W This package was designed to fit a standard pallet size...

Страница 6: ... against the SB300 FOSB so that the snap detail at the base of the handle is under the lower KC plate side support loop 3 Move the handle downward so that the snap detail at the top of the handle is under the upper support loop 4 Move the handle upward until the snap detail at both top and bottom of the handle are locked into position Info Pad INSTALLING THE INFO PADS FIGURE 5 1 Locate the flat si...

Страница 7: ...zontal front to back Z dimensions are vertical STRUCTURE Datum Orientation Relative to the First Wafer All 300 mm wafers when fully seated in the shipper are nominally centered on the vertical line formed by the intersection of the bilateral datum and the facial datum Figure 7 The botom of the first wafer located in the lowest pocket of the FOSB is located nominally at 44 mm above the horizontal d...

Страница 8: ...300 mm FOSB must function with these features but the precise mating feature size position and design are up to the carrier maker The features of the FOSB that mate with an E62 FOSB door opener are defined by the Entegris design specification In general this compatibility involves proper clearance around and location relative to the E62 FOSB door opener features Since the force required to attach ...

Страница 9: ...the kinematic coupling that is the universal equipment interface for all types of 300 mm wafer carriers This standard describes very specifically the shape and position of three pins The 300 mm carrier must have features which register with these pins but the shape of these features is up to the carrier maker to design The test of a wafer carrier s compliance to E57 can only be made by placing tha...

Страница 10: ...clude Door registration pins Kinematic coupling pins Port door Latch keys Primary hold down Standard Operation Operation of individual load port models will vary Basic load port operation includes The FOSB is placed on the load port and located by the kinematic coupling pins The load port advances the FOSB to the port door engaging the primary hold down to retain the FOSB on the load port The door...

Страница 11: ...peration is 4 4 Newton meters maximum BOTTOM INTERFACE POINTS Kinematic Coupling The kinematic coupling is used to precisely locate the FOSB on equipment It incorporates kinematic coupling grooves that accommodate both standard inner and outer kinematic coupling pins Recommendations The kinematic coupling is the only acceptable interface mechanism for FOSBs and equipment load ports The primary out...

Страница 12: ...ions and Documents SEMI E47 1 Sensor Pads Sensor pads are used to verify FOSB presence and proper placement Recommendations For accurate operation use only the recommended sensor pads Related Specifications and Documents SEMI E1 9 E47 1 FEOL and BEOL Pads FEOL front end of line and BEOL back end of line pads are used to prevent FEOL pods from being processed on BEOL load ports and vice versa which...

Страница 13: ...n the angled work surface Selection of the most suitable angle to be used is dependent on the height of the assembly workstation Errors are greatly minimized using this assembly method However it is also required that a visual inspection be performed after each assembly to make sure the wafers are properly engaged with the door cushion This is most easily done when viewing the wafers and cushion t...

Страница 14: ... the footer Entegris the Entegris Rings Design and other product names are trademarks of Entegris Inc as listed on entegris com trademarks All third party product names logos and company names are trademarks or registered trademarks of their respective owners Use of them does not imply any affiliation sponsorship or endorsement by the trademark owner 2013 2020 Entegris Inc All rights reserved Prin...

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