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SB300 FOSB FOR 300 MM WAFERS
User Manual | Entegris, Inc.
INTRODUCTION
—
The SB300 front opening shipping box (FOSB) is an
innovative 300 mm shipper that offers the benefits
of manual and front-opening interface mechanical
standard (FIMS)-compatible automation handling.
The dual-functionality of the door allows users to
easily move from manual operation to FIMS.
FEATURES
—
TERMINOLOGY
• FIMS is the specification characterizing the
automated interface between a FOSB and
related equipment, as defined by SEMI
®
E62
• FOSB is a wafer shipping box with a front-
opening interface, as defined by SEMI M31
FIMS COMPATIBILITY
• Provides FIMS automation benefits
• Reduces labor costs associated with manual
door operation
• Allows maximum 300 mm loadport interoperability
• Ensures accurate equipment interaction
SECURE WAFER PROTECTION
• Automated operation minimizes potential
contamination from human interaction
• Wafer plane accuracy
• Ultrapure, low outgassing materials provide
superior protection for wafer shipment
• Protects wafers during 1.5 m drop tests
• All-plastic assembly prevents metallic
contamination and corrosion
ERGONOMIC MANUAL HANDLING
• Door design allows safe and easy opening
and closing in manual mode
IDENTIFICATION
• Innovative insert-molded barcode ensures lifetime
identification and traceability
• Clear polycarbonate door and shell allow visual
observation of wafers
• Info pads to detect FOSB differences
• Built-in horizontal RFID holder in KC plate
• Vertical RFID holder optional
CLEANABILITY
• Designed for liquid flow-through and drying
• Complete door assembly can be cleaned
without disassembly
