entegris SB300 FOSB, Руководство пользователя

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SB300 FOSB FOR 300 MM WAFERS
User Manual | Entegris, Inc.
TABLE OF CONTENTS
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Introduction ...................................................................... 2
Features .............................................................................. 2
Terminology .................................................................... 2
FIMS Compatibility ........................................................ 2
Automated Ergonomic Handling .............................. 2
Identification ................................................................... 2
Cleanability ...................................................................... 2
Components and Materials ........................................... 3
Door .................................................................................. 3
Shell ................................................................................... 4
Secondary Packaging ..................................................... 4
Standard Two-pack ....................................................... 4
Assembly Instructions ..................................................... 5
SB300 Options ............................................................... 5
Datum Orientation .......................................................... 6
Horizontal Datum ........................................................... 6
Facial Datum ................................................................... 6
Bilateral Datum ............................................................... 6
X, Y, and Z Dimensions ................................................ 6
Structure .......................................................................... 6
SEMI ® Standards ................................................................ 7
SEMI E62 .......................................................................... 7
SEMI M31-0999 ............................................................. 7
SEMI E106 ........................................................................ 8
SEMI E47.1 ........................................................................ 8
SEMI E57 .......................................................................... 8
Specifications .................................................................... 8
Equipment Interface ....................................................... 9
Load Port Interface ........................................................ 9
Door Interface Points ................................................. 10
Bottom Interface Points ............................................ 10
General Use Instructions .............................................. 12
Manual Assembly .......................................................... 12
D-ring Handles ............................................................. 12
Limited Warranty ............................................................ 13
For More Information ................................................... 13
Terms and Conditions of Sale ..................................... 13