10
SB300 FOSB FOR 300 MM WAFERS
User Manual | Entegris, Inc.
DOOR INTERFACE POINTS
Registration Hole and Slot
The registration hole and slot are used to properly
locate the door. Registration pins on load ports
interface with the round registration hole and
angled slot to ensure correct door location.
The hole and slot must both be used to properly
locate the door. See SEMI E62.
Automated Key Slots
Automated key slots are used for automated door
latch actuation and for door retention. The key slots
accommodate standard t-shaped keys. The keys are
inserted into the key slot and rotated 90° counter-
clockwise (as viewed from the FOSB) to unlatch the
door. In this position, the keys securely hold the door
for removal. When the door is replaced in position,
rotating the keys 90° clockwise (as viewed from the
FOSB side of the interface) engages the door latches
and allows the keys to be removed.
To operate properly, the FOSB must be advanced so it
is within 0.5 mm of the load port bulkhead (see SEMI
E62). Torque required for key operation is 4.4 Newton
meters maximum.
BOTTOM INTERFACE POINTS
Kinematic Coupling
The kinematic coupling is used to precisely locate
the FOSB on equipment. It incorporates kinematic
coupling grooves that accommodate both standard
inner and outer kinematic coupling pins.
Recommendations
The kinematic coupling is the only acceptable
interface mechanism for FOSBs and equipment load
ports. The primary outer pins increase stability and
accuracy, and are therefore recommended for load
port interface. The inner pins are less accurate and
are recommended for use only in AMHS applications.
Related Specifications and Documents
• SEMI E57
Hold Down Features
The hold down features are used to retain the FOSB
in position. Two sets of features are provided. The
primary hold down feature, located on the front of
the FOSB, is a passive restraint that engages when the
FOSB is advanced. The secondary hold down feature
is an active restraint, utilizing a keyway slot that accom-
modates a standard t-shaped key. The key is inserted
into the keyway slot and rotated 90° in either direction
to hold the FOSB in place.
Figure 13. Registration hole and slot
Figure 14. Automated key slots
Figure 15. Kinematic coupling
Figure 16. Hold down features
