NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Pa
Appendix
Touch Screen Panel – Start, Stop and
Vent buttons
Touch Screen Panel – Process Number
Selection
Touch Screen Panel – E-GUN Pocket
Control
MAIN PWR, E-GUN PWR and
HEATING PWR Breakers
MDC360C – Deposition Rate, Power,
Thickness and Process Time
Parameters
MDC-360C – Alpha and Number
Keypad
ge 17 of 18