NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Page 9 of 18
controller, unless the system was recently used. (Chamber ion gauge reading is
found on the Vacuum Gauge Controller.)
3. The cryopump temperature is 12K or less.
4. The chamber temperature is 20°C or less (reading is found on touch screen
panel)
5. The crystal health is greater than 80%. (Readout on MAKTEK controller.)
4.5 Status checks
1. Check the NFF website for reservations, problems and to see if it is already
enabled by another user.
2. Check for an EMPTY sign attached to the machine. Do not use if an IN USE
sign or MAINTENANCE sign is there. Check for problem notes.
3. The system is available if the initial system and status checks are normal.
Check-in the equipment and enable the system on NFF Machine Reservation
System. Place sign “IN USE” on the machine.
4.6 Venting the chamber (before loading wafers)
1. Make sure TELEMARK TT-3 power supply main power is turned off.
2. Wait 10 minutes for cooling after evaporation process.
3. Press the “VENT” button on the touch screen panel.
4. Wait until the 307 Granville-Phillips Vacuum Gauge Controller is displayed
7.6e+2 Torr (about 4 minutes).
5. Verify the main chamber door seal has decompressed.
6. The chamber door can be opened.