NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Page 15 of 18
37. Rotate to the new crucible. Follow instructions starting at Step 1 in the
“Deposition” section.
38. Selected correct crucible, it may take a moment to rotate. See position/material
list posted on E-Gun Pocket Control page.
39. If finish the process, make sure wait at least 10 minutes for all materials firstly,
this cools the targets before venting, which prevents oxidizing them.
40. Press TELEMARK TT-3 power supply,
Main Power
breaker “OFF”.
41. DO NOT VENT UNTIL COOLED FOR 10 MINUTES.
4.11
Venting and unloading
1. Make sure TELEMARK TT-3 power supply main power is turned off.
2. Wait 10 minutes for cooling after evaporation process.
3. Press the “VENT” button on the touch screen panel.
4. Wait until the 307 Granville-Phillips Vacuum Gauge Controller is displayed
7.6e+2 Torr (about 10 minutes).
5. Verify the main chamber door seal has decompressed.
6. The chamber door can be opened.
7. Remove wafers and inspect visually. You’ll be responsible if damage
has occurred and you didn’t report it.
8. Put the Al dummy back to substrate holder.
9. Perform the required crucible, shutter, and chamber inspections and clean as
per previous instructions.
10. If process finish, please check-out the equipment and disable the system on