NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Pa
TT-3 Control – Interlocks
TT-3 Control – XY Sweep (Long and
Lat)
MDC-360C – Main Menu
MDC-360C – Select Process
MDC-360C – Material and Thickness
Input
MDC-360C – Display, e.g. Deposition
Rate, Power, Thickness, etc…
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