NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Page 14 of 18
NUMBER” of MAXTEK MDC-360C Deposition Controller.
23. Press “LOAD” for recipe load.
24. Press “BACK” button to return “Menu” page.
25. Select “PROCESS” button to return “Process” page.
26. Check that the base pressure is about 3.0e-6 Torr or below. Record the pump
down time, pressure and your deposition thickness in the logsheet.
27. Press “START” button for E-Beam process start.
28. Observe the electron beam each time the power is increased and adjust the
position as necessary using the “LAT/LONG POS” in the SWEEP SELECT.
29. Verify that the E-Beam is directed into the center of the crucible.
IMPORTANT!
30. Don’t let the E-Beam go outside the source area and ruin the crucible!
31. Check that the rate of deposition is normal for the power applied (In general,
deposition power is not over 40%). If not, Press “STOP” button to stop
running process immediately, please contact to NFF staff.
On the MAXTEK MDC-360C Deposition Controller console:
32. When process is started, be sure that the DC amps gauge does not exceed
0.4A.
33. Check that the Kilovolts meter reads at -6.82kV, not exceed -7kV.
34. If so, press “STOP” button in “Touch Screen Panel”
35. Report these problems to NFF staff.
On the master console touch screen panel:
36. To deposit another type of material let the crucible cool for 5-10 minutes.
