NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Pa
1. Picture and Location
Granville
‐
Phillips
Vacuum
Gauge
Touch
Screen
Panel
Logsheet
MAXTEK
MDC
‐
360C
Deposition
Controller
Telemark
XY
Sweep
Viewport
Main,
E
‐
Gun
and
Heating
P
ower Breakers
TT
‐
3
Hig
h Voltage DC
Power Supply
Fig 1
: AST Peva-450I E-Beam Evaporation System
This tool is located at NFF Enterprise Center Cleanroom Room 4162
2. Process Capabilities
2.1 Cleanliness Standard
AST Peva-450I E-Beam Evaporation System is “Non-Standard” equipment for metal
evaporation process use.
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