NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
Version
1.0
Page 2 of 18
Contents
1. Picture and Location
2. Process Capabilities
2.1
Cleanliness Standard
2.2
Available Deposition Materials
2.3
Performance of the AST Peva-450I
3. Contact List and How to Become a Qualified User
3.1
Emergency Responses and Communications
3.2
Training to Become a Qualified AST Peva-450I User
4. Operating Procedures
4.1
System Description
4.2
Safety Warnings
4.3
Operation Rules
4.4
Initial System Checks
4.5
Status Checks
4.6
Venting the Chamber (Before Loading Wafers)
4.7
Inspecting the Chamber Before Use
4.8
Load Wafers
4.9
Pump Down
4.10
Deposition
4.11
Venting and Unloading
4.12
Pump Down and Shutdown
5. Appendix
