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TECHNICAL INFORMATION
91/107
87-901-011-01
Window Meanings
N. Read/
Write
Data
Type
Description Admitted
Values
000 R/W L Start/Stop
(in remote
mode the
window is a
read only)
Start = 1
Stop = 0
001 R/W L Low
speed
activation
0 = OFF
1 = ON
(default = 0)
008 R/W L Remote
(default) or
Serial con-
figuration
Remote = 1
Serial = 0
(default = 1)
100 R/W L Soft
Start
(write only in
Stop condi-
tion)
YES = 1
NO = 0
(default = 1 the
first time and 0
for the following)
101 R/W N Set
Point
type
0 = Frequency
1 = Current
2 = Time
3 = Status
(default = 3)
102 R/W N Set
Point
threshold (ex-
pressed in
Hz, mA or s)
(default = 500)
103 R/W N Set
Point
mask: time
between the
pump start
and the set
point check
(seconds)
0 to 99999
(default = 0)
104 R/W L Set
Point
signal acti-
vation type:
the signal
can be
"N.O." or
"N.C."
0 = active close
(N.O.)
1 = active open
(N.C.)
(default = 0)
105 R/W N Set
point
hysteresis
(in % of
threshold)
0 to 100
(default = 2)
107
R/W
L
Active stop
0 = NO
1 = YES
(default = 0)
108
R/W
N
Baud rate
600 = 0
1200 = 1
2400 = 2
4800 = 3
9600 = 4
(default = 4)
109 W L Pump
life/
cycle time/
cycle num-
ber reset
To reset write ‘1’
N. Read/
Write
Data
Type
Description Admitted
Values
111 R/W L Analog
out-
put type:
output volt-
age signal
proportional
to frequency
or power
0 = frequency
1 = power
(default = 0)
114 R/W N Purge
gas
type
0 = N
2
1 = Ar
115 R/W L Threshold
flowmeter
sccm
117 R/W N Low
speed
setting (Hz)
510 to win. 121
(default = 510)
120 R/W N High
speed
setting (Hz)
510 to win. 121
(default = 530)
121 R/W N Maximum
excitation
frequency in
Hz (active
only in Stop
condition)
510 to 530
(default = 530)
122 R/W L Set
vent
valve
open/close
(N.C.)
1 = open
0 = close
(default = 0)
123
124
Reserved to Varian service
125 R/W L Valves
oper-
ating mode
0 = Controlled
Vent Procedure
(default)
1 = on command
(see win.146)
126 R/W N Vent
valve
opening
delay
(expressed
in 0.2 sec)
0 to 65535
(corresponding to
0 to 13107 sec)
(default = 1)
130
Reserved to Varian service
145 R/W
L Set
purge
valve
open/close
0 = close
1 = open
(default = 1)
146 R/W
L Set
valves
command
source
0 = Serial
1 = Remote
(default = 1)
147 R/W N Vent
Valve
Opening
Time (ex-
pressed in
0.2 sec)
0 to 65535 bit
(0=infinite,
1=0.2sec,
max=13107 sec)
(default =0)
152 R/W L HPS
enable
0 = OFF
1 = ON
(default = 0)
write only in
STOP
155 R N Power
limit
applied
W
Содержание 969-8888
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