Agilent Technologies 969-8888, Инструкция по эксплуатации

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INSTRUCTIONS FOR USE
77/107 87-901-011-01
CAUTION
Remove connector protections only after fixing the turbopump
to the system.
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk. Dur-
ing operation, the following environmental conditions must be
respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
air temperature: from +5°C to +35°C
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical
Information" for detailed information.
The Turbo-V 3K-G must be connected to a primary pump (see
"Technical Information").
The Turbo-V 3K-G can be installed in any position. Fix the
Turbo-V 3K-G in a stable position connecting the inlet flange of
the turbopump to a fixed counter-flange capable of withstanding
a torque of 33000 Nm around its axis.
The turbopump with ISO F inlet flange must be fixed to the
vacuum chamber by means of bolts with a strength class of
12.9 (
σ
r
= 1200 N/mm
2
). The following table shows the neces-
sary number of steel bolts and the relevant fixing torque as
recommended by Varian.
FLANGE
FIXING
DEVICE
N.
FIXING
TORQUE
ISO 250 F M10 bolts 12 30 Nm

WARNING!
The Turbo-V 3K-G cannot be fixed by means of its base. The
system can only be fixed through its ISO 250F flange.

WARNING!
Failure to comply with these installation instructions could result
in the pump detaching from the system in the event of a rotor
failure, which could cause property damage or serious injury or
death.
CAUTION
The Turbo-V 3K-G belongs to the second installation (or over-
voltage) category as per directive EN 61010-1. Connect the
device to a mains line that satisfy the above category.
Use the provided mating connectors in order to maintain the IP-
54 protection level.
The Turbo-V 3K-G has Input/Output and serial communication
connectors that must be connected to external circuits in such a
way that no electrical part is accessible.
Be sure that the insulation of the device connected to the
Turbo-V 3K-G is adequate even in the case of single fault as
per directive EN 61010-1.
For installation of optional accessories, see "Technical Informa-
tion".
USE
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of
the system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 80 °C.
While operating the pump the rotor temperature must never
exceed 120 °C.
The user must be sure to set the correct gas mode, according
to the pumped gas: 1 for N
2
and lighter gases, 0 for Argon (de-
fault) by means of 157 serial command. See the annex "Tech-
nical Information" for details.

WARNING!
Never use the turbopump when the inlet flange is not con-
nected to the vacuum chamber or is not blanked.
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
CAUTION
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 1 bar
(above atmospheric pressure).
For pumping gases containing particulate or aggressive pollut-
ants for the bearings, these pumps are fitted with a special port
to allow a steady flow of inert gas (like N
2
, He) for pump bearing
protection (see the appendix "Technical Information").
CAUTION
Never use the pump with corrosive gases or vapor to avoid
damage to the internal materials of the pump.

WARNING!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases. The
pump is designed to pump high throughput of N
2
, Ar and lighter
gas. Should you need to pump gases heavier than Ar, please
contact Varian technical support for information.