8
3. Names and functions of parts
Main unit
Operation panel
Air amount indicator
(optional) attachment part
Power cord
Maintenance door
O
2
sensor flow meter
N
2
flow meter
Circulation path filter
Gas selector switch
N
2
bombe connection port
Duct connection (outlet)
Cooling fan
ELB with over current protector
Duct connection port
Collecting flask door
For installation 2L collecting flask
Discharge port
Pressurized air discharge port
Com cable connection
N
2
discharge port
Roots blower oil change port
