Chapter 8 - Operating Procedures
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MNL000536
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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7.
!!OPERATOR PROMPT!!
The process gas wetted area from the source
container valve V-8 to MV-1 (deep purge) or
MV-2 (cross purge) will be evacuated of purge
gas.
Note: A subroutine will perform the Vacuum
Leak Test (Cylinder Leak Test) to insure the
source container valve is closed.
The leak test status is displayed in the status box
in the bottom left corner.
Note: During the leak test the status box displays
the following:
1)
The leak test being run.
2)
The process line number.
3)
The time remaining until the completion of
the leak test.
(1) (2) (3)
Note: Upon successful completion of the leak
test, a purge/vent subroutine is run to purge out
the pigtail.
During the cycle purge, status is displayed in the
status box in the bottom left corner.
