Chapter 10 - Maintenance
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MNL000538
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
10
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12
MI Maintenance Activities for Valve Manifold Boxes
Name of Equipment: ________________________________________________
Name of Inspector(s): ______________________________________ _________
Signature of Inspector(s): ________________________________________________
INSPECTION OR TEST
SYSTEM
TYPE
ACCEPTABLE
(Y/N/NA)
INSPECTED
BY
(Initial)
3 Months
Date:
Visual inspection of piping and wetted components for leaks and
damage that could lead to loss of containment.
T,F,P,C
Visual inspection of wiring and electrical components for damage to
insulation, corrosion
T,F,P,C
1 Year
Date:
Cabinet Exhaust Low alarm
T,F,P,C
Grounding Inspection and Verification
F,P
Gas Detection System
T, F, P, C
2 Years
Date:
Line heater over-temperature interlock test (if applicable)
All
Verify that self-closing mechanism for cabinet doors and windows
closes.
F,P,T, C
Verify High Pressure Shutdown
T,F,P,C
Co-axial pressure shutdown
T,F,P,C
3 Years
Date:
Test or Replace safety relief valves
C
EGO, EMP or EPO or E-stop or Remote E-stop or Customer remote
shutdown
T,F,P,C
4 Years
Date:
Test or Replace safety relief valves
F,P,T
6 Years
Date:
Test or Replace safety relief valves
Inerts
10 Years
Date:
Replace Exhaust Switch per 3EQ95702
T,F,P,C
C=corrosive; F=flammable; P= pyrophoric; T= Toxic; I = Inerts; O = Oxidizers
Corrective Actions Required: