Chapter 7 - System Description
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MNL000535
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Auto HPLT Option
If a standard purge module has been purchased from Versum Materials, Inc., it will come pre-
configured to supply purge and High Pressure Leak Test (HPLT) gas to the module. One of the purge
module outlets must be field piped to the module Purge N2/HPLT inlet leading to V-11. The AP11
controller prompts the operator to switch from purge gas supply to HPLT and back again at the
appropriate time. When the Auto HPLT option is selected, the CV9/V10 inlet is added and software is
enabled to automatically switch between low pressure purge and HPLT modes without the need for
operator action.
Drum and Y Container Blanket Heater Option
A container blanket heater may be needed, depending on process gas properties, flow rate, and
environmental conditions. Versum Materials, Inc. offers two styles of heaters that can be used in
conjunction with modules. Analog retransmission of source container heater temperatures can be
displayed on the AP11 controller screen.
The Gen II blanket heater design allows the controller to be remote located, with only a power and
thermocouple junction box located adjacent to the container. Wiring between the junction boxes and
heater controller is customer-supplied and installed. Please see the separate Gen II Blanket Heater
operation manual for details.
The Compact blanket heater design requires the controller to be located within 15’ of the container.
Heater blanket power and thermocouple leads are wired directly into the heater controller. Please see
the separate Compact Blanket Heater operation manual for details.
NH3 ISO Container Heater Option
When NH3 flow rates exceed that of heated Y containers and drums, an NH3 ISO container and heater
controller are required, and can be used in conjunction with a module. The NH3 ISO heater design
allows the controller to be remote located, with only a power and thermocouple junction box located
near the container. Wiring between the junction boxes and heater controller is to be customer supplied
and installed. There are four power cables, one thermocouple cable, and one door interlock cable to
be plugged into the ISO container. Please see the separate NH3 ISO Container Heater operation
manual for details.
Heat Trace Option
Factory-installed heat trace controlled by the eV ECC is an option. Three zones of heating are offered
– panel, source A and source B. A total of 125’ (38m) of 240VAC 12W/ft (40W/m) heat trace line can
be supported with ~32’ (10m) of that amount typically being consumed by the panel heat trace. The
temperatures of each heat trace zone is displayed on the AP11 controller. Heat trace downstream of
the BSGS eV / BULKGUARD eV process outlet is customer scope.
