Chapter 10 - Maintenance
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MNL000538
Revision 1
03/26/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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1.0 Routine Maintenance
The following maintenance must be performed at the indicated times. It is critical that replacement
components and parts are identical to the original item to avoid hazardous malfunctions or leaks. Note:
All components and parts have been selected to be compatible with the gases to which they may be
exposed. This is particularly critical for the soft goods (e.g., O-rings, valves, seats and seals, etc.).
Consult Versum Materials, Inc. if there is any question about part compatibility with a particular gas.
If necessary, maintenance personnel should make use of a step stool or small ladder to safely access
the controller.
Maintenance is only to be performed by
trained personnel who understand the
hazards of the system.
Electrical power to the system must be
turned off before servicing system
components is attempted.
Personal injury or death may result if
proper personal protective equipment
(PPE) is not worn when performing
troubleshooting and maintenance.
Burn Hazard. Before performing
maintenance, allow J-T heaters and piping
downstream to cool to room temperature.
