Chapter 2 - Installation
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MNL000530
Revision 1
03/15/2018
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Depending on the configuration, the following facility tubing connections may be supplied with a
module:
Process outlet A
:
1/2" (12.7 mm) diameter, 0.049" (1.2 mm) wall thickness
Optional coax
3/4" (19 mm) diameter, 0.065” (1.6 mm) wall thickness
Process outlet B/C/D (opt)
: 1/2" (12.7 mm) diameter, 0.049" (1.2 mm) wall thickness
Optional coax
3/4" (19 mm) diameter, 0.065” (1.6 mm) wall thickness
NOTE – Optional process C and D are shipped with external open-ended piping spools
installed to provide stability during shipment. These process lines must be capped if they are
not facilitated at the customer site.
Purge and High Pressure Leak Check (HPLT) Gas Inlet:
1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness
Venturi inlet
:
1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness
Vent outlet:
3/8" (9.5 mm) diameter, 0.035" (0.9 mm) wall thickness
Bonnet Vent outlet (up to four lines):
1/4" (6.4 mm) diameter, 0.035" (0.9 mm) wall thickness
Enclosure Exhaust:
6" (152.4 mm) outside diameter duct
Pneumatics and Z-Purge:
¼” (6.3 mm) outside diameter compression fitting.
The process line connections can be furnished in one of two configurations: Standard Bulkhead or
Coaxial Bulkhead. All other connections, such as purge, Venturi inlet, and vent, will be furnished with
standard bulkheads.
The standard bulkhead permits a single process out line to penetrate the enclosure, while providing an
acceptable seal for enclosure ventilation purposes. Figure 2-2 shows a standard bulkhead.
Figure 2-2. Standard Bulkhead
1/2 TOD Gas Line
Continuous (Passes Through
Bulkhead)
Cabinet Top
Compression Fitting
Grips OD of Tube
Nut