Chapter 1 - Safety Warnings
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MNL000127
Revision 8
07/27/2016
Gas Equipment
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Do not use this device in any manner other
than specified in this manual.
Do not make any changes to the equipment
independently. INJURY or DEATH may
result from unauthorized modifications.
All modifications to equipment MUST be
approved in writing by an Versum
Materials, Inc.' Representative.
1.3
Inert Gas Hazards
High concentrations of nitrogen, helium, or
other inert gases can cause an oxygen
deficient atmosphere in a confined area
which can cause DEATH. All personnel
must read and understand the material
safety data sheet(s) (MSDS) for the specific
gas(es) being used.
Oxygen concentrations of 19.5% or less can greatly increase the hazard of asphyxiation to personnel.
Before working in an area where nitrogen, helium or other inert gases could be present, check the area
with an oxygen monitor to be sure the oxygen concentration is between 19.5% and 23%. While
working in the area, the oxygen concentration needs to be monitored with a continuous oxygen
monitor. Always provide adequate ventilation in the work area to decrease the risk of an oxygen
deficient atmosphere.
Personnel in an oxygen deficient atmosphere will not realize they are being asphyxiated. Breathing of
pure inert gases will cause immediate unconsciousness. Symptoms of asphyxia include:
Rapid breathing
Nausea
Vomiting
Inability to move
Convulsive movements
Collapse
Abnormal pulse
Rapid fatigue