Appendix D - Pre-Facilitation Checklist
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MNL000541
Revision 0
10/04/2017
BSGS eV / BULKGUARD eV
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page APP
D
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Versum Materials Confidential
This document provides an installation review checklist for proper connections, utilities, and
system requirements. This will assure the BSGS eV / BULKGUARD
®
eV is not damaged by any
incorrect or missing connections and that the installation is ready to proceed to the commissioning
phase (final test and first time charging of Hazardous Gas). This document must be completed for
each installation.
Versum Materials, Inc. may be providing startup resources to the Customer Site. Completing the
activities shown on this checklist prior to the arrival of the Versum Materials, Inc.’ Equipment
Startup Team personnel will avoid unnecessary delays and costs to the project and customer. With
an accurately completed checklist, the Versum Materials, Inc.’ Equipment Startup Team
commissioning and startup activity should require less time and proceed in a more efficient and
safe manner.
When the Versum Materials, Inc. startup service is requested, the Equipment Startup Team will
use this checklist to review the installation. If the installation does not satisfy the requirements for
facilitation and startup, the team will provide a list of the discrepancies to the designated site
representative. Depending on the scope of discrepancies, the Versum Materials, Inc. Equipment
Startup Team may decide to return from the customer site and re-schedule the facilitation activity,
or the team may wait onsite until the system is ready for facilitation. Either option may result in
additional cost impact to the customer.
Definitions
BSGeV – BSGS eV or BULKGUARD
®
eV
LSS - Life Safety Systems (Facility gas detection or hazardous monitoring systems.)
SL1 (Safety Level 1) - Equipment is OK to power up and pressurize with inert gas for testing.
SL2 (Safety Level 2) - Equipment is OK to install process gas cylinder and pressurize with
process gas.
SL3 (Safety Level 3) - Equipment is qualified with the fab process.
Acceptance - the process of verifying the incoming equipment to site specifications and properly
mounting the equipment in the correct location and orientation prior to facilitation.
Facilitation - the process of installing all utilities and piping to support the equipment and
verifying the operation and safety of the gas delivery equipment. This includes electrical testing
/ checkout and alarm functional testing. This includes Safety Level 1 & Safety Level 2, which
must be completed prior to commissioning the system with process gas.
Commissioning - the process of verifying operational safety followed by the first time charging
of process gas. This includes purifier conditioning, fluorine passivation, etc.
