Model 979 Series Helium Mass Spectrometer Leak Detector
4-14
DRAFT 9/15/03
3. Examine the ion source (Figure 4-13) and cavity (Figure 4-14) for deposits and
discoloration. When examination is completed, dispose of it properly or return it to
Vacuum Technologies for exchange.
Figure 4-13
The Ion Source
4. Looking into the ion source cavity (Figure 4-14) you will see the ground slit plate
➀
.
Figure 4-14
Ion Source Cavity
➀
Summary of Contents for 979 Series
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