Ulvac UTM300B, Instruction Manual

Page: 3 / 113

ii
Precautions for Safe Operation
The instruction manual's nomenclature for warnings and precautions complies with
the following safety warning symbols.
Indicates a potentially hazardous situation which, if not avoided, could
result in serious injuly or possibly death.
Indicates a potentially hazardous situation which, if not avoided, may
result in minor to moderate injuly or equipment damage.
Emphasizes additional information that is provided to ensure the proper
use of this product.
Turbo molecular pump repair and/or power supply repair can be very hazardous.
Only trained technicians who are authorized by ULVAC may do service of
products.
Neither overhaul nor modify the pump proper and the controller without admission.
Doing so would impair safety of the pump proper.
Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary. The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who
decides system compatibility.
WARNING
CAUTION
NOTICE
WARNING
WARNING
WARNING