Ulvac UTM300B, Instruction Manual

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4.4 Maximum allowable flow rate
4.4
Maximum allowable flow rate
Condition
Maximum
allowable flow rate
(Note 2)
Backing
pump
Ambient
temperature
Gas type
(Note 1)
Cooling method Gas purge
120 L/min
5 ~ 25
degrees C.
N
2
Natural convection No 10 mL/min
Forced air No 100 mL/min
Ar Forced air
No 30 mL/min
Yes (Note 3) 40 mL/min
(Note 1) Consult your ULVAC representative before using gasses except shown in above table.
(Note 2) mL/min : volume flow rate at 0 degrees C., 1atm. (Compatible with SCCM.)
(Note 3) Recommended gas purge condition : N
2
gas, 25 mL/min.